Method and apparatus for manufacturing silicon carbide single crystal
US-2025354296-A1 · Nov 20, 2025 · US
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Feed and outlet means for the gases; Modifying the flow of the gases
Feed and outlet means for the gases; Modifying the flow of the gases · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C30B31/16 |
| Official title | Feed and outlet means for the gases; Modifying the flow of the gases |
| Display label | Feed and outlet means for the gases; Modifying the flow of the gases |
| Total patents | 14 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is declining.
| Year | Patents |
|---|---|
| 2015 | 1 |
| 2016 | 2 |
| 2017 | 2 |
| 2018 | 1 |
| 2019 | 2 |
| 2020 | 2 |
| 2021 | 1 |
| 2022 | 1 |
| 2023 | 1 |
| 2025 | 1 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Deposit removing device and deposit removing method
US-11639560-B2 · May 2, 2023 · US
Deposit removing device and deposit removing method
US-2022267929-A1 · Aug 25, 2022 · US
System based on low-pressure chemical vapor deposition for fabricating perovskite film from organic halide compound and metal halide compound
US-10975498-B2 · Apr 13, 2021 · US
Atomic layer deposition method
US-10858736-B2 · Dec 8, 2020 · US
Inject insert for EPI chamber
US-10760161-B2 · Sep 1, 2020 · US
Gas supply pipe, and gas treatment equipment
US-10364498-B2 · Jul 30, 2019 · US
Substrate treating apparatus
US-10208401-B2 · Feb 19, 2019 · US
Substrate treating apparatus
US-2018266017-A1 · Sep 20, 2018 · US
System and method based on low-pressure chemical vapor deposition for fabricating perovskite film
US-2017268128-A1 · Sep 21, 2017 · US
Atomic Layer Deposition Method
US-2017081761-A1 · Mar 23, 2017 · US
Atomic layer deposition apparatus and method
US-9512519-B2 · Dec 6, 2016 · US
Inject insert for epi chamber
US-2016068956-A1 · Mar 10, 2016 · US
Gas supply pipe, and gas treatment equipment
US-2015275369-A1 · Oct 1, 2015 · US