Gas nozzle substrate processing apparatus
US-D783351-S · Apr 11, 2017 · US
Gas supply pipe, and gas treatment equipment
US10364498B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10364498-B2 |
| Application number | US-201514643165-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 10, 2015 |
| Priority date | Mar 31, 2014 |
| Publication date | Jul 30, 2019 |
| Grant date | Jul 30, 2019 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
According to one embodiment, a gas supply pipe has a first gas pipe configured to blow a gas which has flowed from an inflow opening via first gas blow holes arranged along a longitudinal direction, and a second gas pipe provided in parallel with the first gas pipe. The second gas pipe has second gas blow holes arranged along the longitudinal direction, and allows the gas to flow in a direction opposite to the first gas pipe.
First claim
Opening claim text (preview).
The invention claimed is: 1. A gas supply pipe comprising: a first gas pipe having an inflow opening into which a gas flows and having first gas blow holes arranged apart from one another along a longitudinal direction; and a second gas pipe provided coaxially with the first gas pipe, the second gas pipe having second gas blow holes arranged apart from one another along the longitudinal direction, and allowing the gas to flow in a direction opposite to the first gas pipe, wherein each of the first gas blow holes corresponds to two or more of the second gas blow holes, forming a set of blow holes; in each set of blow holes, the first gas blow hole is sandwiched by the two or more second gas blow holes; two or more sets of blow holes are arranged apart from one another in the first gas pipe and the second gas pipe; and the first gas blow holes and the second gas blow holes allow the gas to blow therefrom toward a center of a treatment target. 2. The gas supply pipe of claim 1 , wherein an end of the first gas pipe opposite to the inflow opening is connected to an inflow side end of the second gas pipe. 3. The gas supply pipe of claim 1 , wherein the pitch of the first gas blow holes is the same as the pitch of the second gas blow holes. 4. Gas treatment equipment comprising: a treatment chamber containing a treatment target; a gas supply pipe configured to supply a gas into the treatment chamber; and a gas supply source connected to an inflow opening of the gas supply pipe, the gas supply pipe comprising a first gas pipe having the inflow opening into which the gas flows and having first gas blow holes arranged apart from one another along a longitudinal direction, and a second gas pipe provided coaxially with the first gas pipe, the second gas pipe having second gas blow holes arranged apart from one another along the longitudinal direction, and allowing the gas to flow in a direction opposite to the first gas pipe, wherein each of the first gas blow holes corresponds to two or more of the second gas blow holes, forming a set of blow holes; in each set of blow holes, the first gas blow hole is sandwiched by the two or more second gas blow holes; two or more sets of blow holes are arranged apart from one another in the first gas pipe and the second gas pipe; and the first gas blow holes and the second gas blow holes allow the gas to blow therefrom toward a center of the treatment target. 5. The gas treatment equipment of claim 4 , wherein an end of the first gas pipe opposite to the inflow opening is connected to an inflow side end of the second gas pipe. 6. The gas treatment equipment of claim 4 , wherein the pitch of the first gas blow holes is the same as the pitch of the second gas blow holes.
Assignees
Inventors
Classifications
- C23C16/45578Primary
Elongated nozzles, tubes with holes · CPC title
the substrate being supported substantially horizontally · CPC title
Gas supply means · CPC title
Feed and outlet means for the gases; Modifying the flow of the gases · CPC title
the substrate being rotated · CPC title
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Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US10364498B2 cover?
- According to one embodiment, a gas supply pipe has a first gas pipe configured to blow a gas which has flowed from an inflow opening via first gas blow holes arranged along a longitudinal direction, and a second gas pipe provided in parallel with the first gas pipe. The second gas pipe has second gas blow holes arranged along the longitudinal direction, and allows the gas to flow in a direction…
- Who is the assignee on this patent?
- Toshiba Kk
- What technology area does this patent fall under?
- Primary CPC classification C23C16/45578. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Jul 30 2019 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).