Inject insert for EPI chamber

Patent metadata

Field	Value
Publication number	US-10760161-B2
Application number	US-201414584441-A
Country	US
Kind code	B2
Filing date	Dec 29, 2014
Priority date	Sep 5, 2014
Publication date	Sep 1, 2020
Grant date	Sep 1, 2020

Abstract

Embodiments of the present invention provide a liner assembly including an inject insert. The inject insert enables tenability of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to embodiment of the present invention.

First claim

What is claimed is:

1. An inject insert, comprising:
a monolithic body with an inner connecting surface configured to connect with a liner body, and an exterior connecting surface configured to connect with a gas delivering device, the inner connecting surface opposite the exterior connecting surface, the monolithic body having:
a plurality of inject ports formed through the monolithic body and parallel to a first plane, each inject port forming an opening in the inner connecting surface and the exterior connecting surface and having a constant width portion, and each injection port has a centerline that extends in a single direction from the inner connecting surface to the exterior connecting surface, the plurality of inject ports creating at least:
a first zone with a first number of inject ports of the plurality of inject ports;
a second zone with a second number of inject ports of the plurality of inject ports, the second number of inject ports being different from the first number of inject ports; and
a third zone with a third number of inject ports of the plurality of inject ports, the third number of inject ports being different from the first number of inject ports and the second number of inject ports; and

a plurality of inject inlets, each of the plurality of inject inlets being connected with at least one of the plurality of inject ports, wherein at least a first inlet of the plurality of inject inlets is positioned at the outer edge of the plurality of inject inlets and comprises a first width, the first width being greater than an average width of the plurality of inject inlets; and
a branch formed between at least two of the plurality of inject ports, within the monolithic body, and wherein the branch is formed upstream of the plurality of inject inlets.

2. The inject insert of claim 1 , wherein the first inlet has a graded increase to the first width.

3. The inject insert of claim 1 , further comprising a second inlet of the plurality of inject inlets comprises a second width, the second width being less than the average width.

4. The inject insert of claim 1 , wherein the monolithic body comprises quartz.

5. The inject insert of claim 1 , wherein there is more than one row of inject ports in the plurality of inject ports.

6. The inject insert of claim 1 , wherein the plurality of inject ports comprises seven or more inject ports.

7. The injection insert of claim 1 , wherein
a width of the inject inlets in the first zone is configured to achieve a first velocity of a gas during processing,
a width of the inject inlets in the second zone is configured to achieve a second velocity of a gas during processing, and
a width of the inject inlets in the third zone is configured to achieve a third velocity of a gas during processing.

8. An inject insert, comprising:
a monolithic body with an inner connecting surface configured to connect with a liner body, and an exterior connecting surface configured to connect with a gas delivering device, the inner connecting surface opposite the exterior connecting surface, the monolithic body having:
a plurality of inject ports formed through the monolithic body and parallel to a first plane, each inject port forming an opening in the inner connecting surface and the exterior connecting surface and having a constant width portion, and each injection port has a centerline that extends in a single direction from the inner connecting surface to the exterior connecting surface, the plurality of inject ports creating at least:
a first zone with a first number of inject ports of the plurality of inject ports;
a second zone with a second number of inject ports of the plurality of inject ports, the second number of inject ports being different from the first number of inject ports; and
a third zone with a third number of inject ports of the plurality of inject ports, the third number of inject ports being different from the first number of inject ports and the second number of inject ports; and

a plurality of inject inlets, each of the plurality of inject inlets being connected with at least one of the plurality of inject ports, wherein at least a first inlet of the plurality of inject inlets is positioned at the outer edge of the plurality of inject inlets, connects to a first inject port of the plurality of inject ports, and comprises a first width, the first width being greater than the constant width portion of the first inject port; and
a branch formed between at least two of the plurality of inject ports, within the monolithic body, and wherein the branch is formed upstream of the plurality of inject inlets.

9. The inject insert of claim 8 , wherein the first inlet has a graded increase to the first width.

10. The inject insert of claim 8 , further comprising a second inlet of the plurality of inject inlets that has a second width and connects to a second inject port of the plurality of inject ports, the second width being less than the constant width portion of the second inject port.

11. The inject insert of claim 8 , wherein the monolithic body comprises quartz.

12. The inject insert of claim 8 , wherein there is more than one row of inject ports in the plurality of inject ports.

13. The injection insert of claim 8 , wherein
a width of the inject inlets in the first zone is configured to achieve a first velocity of a gas during processing,
a width of the inject inlets in the second zone is configured to achieve a second velocity of a gas during processing, and
a width of the inject inlets in the third zone is configured to achieve a third velocity of a gas during processing.

Assignees

• Applied Materials Inc

Inventors

• Lau Shu-Kwan
• Samir Mehmet Tugrul
• Miller Aaron

Classifications

• C23C16/4558 Primary

  Perforated rings · CPC title

• C30B25/14 Primary

  Feed and outlet means for the gases; Modifying the flow of the reactive gases · CPC title

• C23C16/45565

  Shower nozzles · CPC title

• H01J37/3244

  Gas supply means · CPC title

• C30B25/165

  the flow of the reactive gases · CPC title