Ald method and apparatus including a photon source
US-2017342563-A1 · Nov 30, 2017 · US
by irradiation, e.g. photolysis, radiolysis, particle radiation
by irradiation, e.g. photolysis, radiolysis, particle radiation · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C23C16/48 |
| Official title | by irradiation, e.g. photolysis, radiolysis, particle radiation |
| Display label | by irradiation, e.g. photolysis, radiolysis, particle radiation |
| Total patents | 174 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is growing.
| Year | Patents |
|---|---|
| 2015 | 24 |
| 2016 | 23 |
| 2017 | 17 |
| 2018 | 19 |
| 2019 | 11 |
| 2020 | 20 |
| 2021 | 8 |
| 2022 | 10 |
| 2023 | 13 |
| 2024 | 11 |
| 2025 | 14 |
| 2026 | 4 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Ald method and apparatus
US-2017342560-A1 · Nov 30, 2017 · US
Compositions and methods using same for deposition of silicon-containing film
US-2017335449-A1 · Nov 23, 2017 · US
Nano imprinting with reusable polymer template with metallic or oxide coating
US-9816186-B2 · Nov 14, 2017 · US
Method for depositing a planarization layer using polymerization chemical vapor deposition
US-2017323784-A1 · Nov 9, 2017 · US
Formulations for producing indium oxide-containing layers, process for producing them and their use
US-9812330-B2 · Nov 7, 2017 · US
Method for separating a carbon structure from a seed structure
US-2017314122-A1 · Nov 2, 2017 · US
Healing of thin graphenic-based membranes via charged particle irradiation
US-2017296982-A1 · Oct 19, 2017 · US
System and Method for Temperature Control in Plasma Processing System
US-2017278761-A1 · Sep 28, 2017 · US
Method and apparatus for repairing a display panel
US-9685637-B2 · Jun 20, 2017 · US
Low temperature atomic layer deposition of films comprising SiCN or SiCON
US-9643844-B2 · May 9, 2017 · US
Forming method and forming apparatus of carbon nanotubes
US-9564589-B2 · Feb 7, 2017 · US
Methods For Depositing Group 13 Metal or Metalloid Nitride Films
US-2017022612-A1 · Jan 26, 2017 · US
Coating substrate using bernoulli atomic-layer deposition
US-9499906-B2 · Nov 22, 2016 · US
Coated article manufacturing method, coating and laminate
US-2016333214-A1 · Nov 17, 2016 · US
Apparatus and method for uv treatment, chemical treatment, and deposition
US-2016289838-A1 · Oct 6, 2016 · US
Polyolefins having long lasting hydrophilic interfaces
US-2016273104-A1 · Sep 22, 2016 · US
Coating substrate using bernoulli atomic-layer deposition
US-2016237565-A1 · Aug 18, 2016 · US
Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films
US-2016237100-A1 · Aug 18, 2016 · US
Systems and methods for enhancing mobility of atomic or molecular species on a substrate at reduced bulk temperature using acoustic waves, and structures formed using same
US-2016208383-A1 · Jul 21, 2016 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC C23C16/48?
- CPC C23C16/48 is the Cooperative Patent Classification code for “by irradiation, e.g. photolysis, radiolysis, particle radiation.”
- How many patents are filed under CPC C23C16/48 (by irradiation, e.g. photolysis, radiolysis, particle radiation)?
- Our database includes 174 publications tagged with this CPC code.
- Is patent activity under CPC C23C16/48 growing?
- Publication counts under this code: 11 in 2024 vs 14 in 2025 (latest complete years).