Forming method and forming apparatus of carbon nanotubes

Patent metadata

Field	Value
Publication number	US-9564589-B2
Application number	US-201514671274-A
Country	US
Kind code	B2
Filing date	Mar 27, 2015
Priority date	Jun 30, 2003
Publication date	Feb 7, 2017
Grant date	Feb 7, 2017

Abstract

A deposition method of fine particles, includes the steps of irradiating a fine particle beam formed by size-classified fine particles to an irradiated subject under a vacuum state, and depositing the fine particles on a bottom part of a groove structure formed at the irradiated subject.

First claim

What is claimed is:

1. A forming method of carbon nanotubes, comprising the steps of:
irradiating a fine particle beam formed by size-classified catalyst fine particles to an irradiated subject under a vacuum state;
depositing the fine particles on a bottom part of a groove structure formed at the irradiated subject; and
generating a carbon nanotube from the bottom part by using the catalyst fine particles as catalysts.

2. A forming method of carbon nanotubes, comprising the steps of:
generating catalyst fine particles;
size-classifying the catalyst fine particles to desired fine diameters;
irradiating a fine particle beam formed by the size-classified catalyst fine particles to an irradiated subject under a vacuum state, so that the catalyst fine particles are deposited on a bottom part of a groove structure formed at the irradiated subject; and
generating a carbon nanotube from the bottom part by using one of the catalyst fine particles as a catalyst.

3. A forming method of carbon nanotubes, comprising the steps of:
generating catalyst fine particles;
depositing the catalyst fine particles on a substrate; and
generating the carbon nanotube by using one of the catalyst fine particles as a catalyst;
wherein each step is continuously performed under a designated environment cut off from the outside.

4. The forming method of the carbon nanotubes as claimed in claim 3 , wherein the catalyst fine particles are generated by laser ablation.

5. The forming method of the carbon nanotubes as claimed in claim 3 , further comprising a step of: size-classifying the catalyst fine particles to a desired fine diameter after the catalyst fine particles are generated before the catalyst fine particles are deposited.

6. The forming method of the carbon nanotubes as claimed in claim 5 , wherein the catalyst fine particles are classified based on a difference in electrical mobilities of the catalyst fine particles.

7. The forming method of the carbon nanotubes as claimed in claim 5 , wherein the catalyst fine particles are classified based on a difference in inertia of the fine particles.

8. The forming method of the carbon nanotubes as claimed in claim 5 , wherein the catalyst fine particles are covered with a material different from the catalyst fine particles before or after the classification of the catalyst fine particles.

9. The forming method of the carbon nanotubes as claimed in claim 3 , wherein the catalyst fine particles are charged and deposited on the substrate by an electrical field.

10. The forming method of the carbon nanotubes as claimed in claim 3 , wherein a fine particle beam formed by the catalyst fine particles irradiated under a vacuum state and the catalyst fine particles are deposited on the substrate.

11. The forming method of the carbon nanotubes as claimed in claim 3 , wherein a fine particle beam formed by the size-classified catalyst fine particles is irradiated to an irradiated subject under a vacuum state, and the catalyst fine particles are deposited on a bottom part of a groove structure formed at the irradiated subject.

12. A forming apparatus of carbon nanotubes, comprising:
a fine particle generation part configured to generate fine particles;
a deposition part configured to deposit the catalyst fine particles on a substrate; and
a tube generation part configured to generate a carbon nanotube by using one of the catalyst fine particles as a catalyst;
wherein a series of processes from generation of the catalyst fine particles to generation of the carbon nanotubes is continuously performed under a designated environment cut off from the outside.

13. The forming apparatus of the carbon nanotubes as claimed in claim 12 , wherein the catalyst fine particles are generated by laser ablation of the fine particle generation part.

14. The forming apparatus of the carbon nanotubes as claimed in claim 12 , further comprising: a classification part configured to classify the catalyst fine particles to desired fine diameters after the catalyst fine particles are generated before the catalyst fine particles are deposited.

15. The forming apparatus of the carbon nanotubes as claimed in claim 14 , wherein the catalyst fine particles are classified by the classification part based on a difference in electrical mobilities of the catalyst fine particles.

16. The forming apparatus of the carbon nanotubes as claimed in claim 14 , wherein the catalyst fine particles are classified by the classification part based on a difference in inertia of the fine particles.

17. The forming apparatus of the carbon nanotubes as claimed in claim 12 , wherein the catalyst fine particles are charged and deposited on the substrate by an electrical field.

18. The forming apparatus of the carbon nanotubes as claimed in claim 12 , wherein a fine particle beam formed by the size-classified catalyst fine particles is irradiated to an irradiated subject under a vacuum state, by the deposition part.

Assignees

• Fujitsu Ltd

Inventors

• Awano Yuji
• Shimizu Noriyoshi

Classifications

• H10W20/0554

  of nanotubes or nanowires · CPC title

• H10W20/4462

  Carbon or carbon-containing materials, e.g. graphene · CPC title

• H10W20/057

  by selectively depositing, e.g. by using selective CVD or plating · CPC title

• H10W20/055

  by formation methods other than physical vapour deposition [PVD], chemical vapour deposition [CVD] or liquid deposition · CPC title

• H10W20/045

  for deposition from the gaseous phase, e.g. for chemical vapour deposition [CVD] · CPC title