Systems and methods for enhancing mobility of atomic or molecular species on a substrate at reduced bulk temperature using acoustic waves, and structures formed using same

Patent metadata

Field	Value
Publication number	US-2016208383-A1
Application number	US-201615053878-A
Country	US
Kind code	A1
Filing date	Feb 25, 2016
Priority date	Jan 11, 2013
Publication date	Jul 21, 2016
Grant date	—

Abstract

Under one aspect of the present invention, a method for enhancing mobility of an atomic or molecular species on a substrate may include exposing a first region of a substrate to an atomic or molecular species that forms a molecular bond with the substrate in the first region; directing a laser pulse to a second region of the substrate so as to generate an acoustic wave in the second region, the acoustic wave having spatial and temporal characteristics selected to alter the molecular bond; and transmitting the acoustic wave from the second region to the first region, the acoustic wave altering the molecular bond between the substrate and the atomic or molecular species to enhance mobility of the atomic or molecular species on the substrate in the first region.

First claim

1 - 17 . (canceled)

18 . A structure comprising:
a substrate having a damage threshold temperature; and a material disposed on the substrate, the material having a reaction temperature that is higher than the damage threshold temperature of the substrate.

19 . The structure of claim 18 , wherein the substrate comprises an integrated circuit, a chalcogenide glass, a ZBLAN glass, or a polymer.

20 . The structure of claim 19 , wherein the polymer comprises polycarbonate, poly(methyl methacrylate), polystyrene, polyvinyl chloride, or polyethylene terephthalate.

21 . The structure of claim 19 , wherein the material comprises silicon nitride, graphene, carbon nanotubes, diamond, titanium dioxide, titanium boride, zirconium oxide, yttria-stabilized zirconium, boron carbide, boron nitride, or metal.

Assignees

• Aerospace Corp

Inventors

• Helvajian Henry

Classifications

• Y10T428/31507

  Of polycarbonate · CPC title

• C23C14/22

  characterised by the process of coating · CPC title

• Y10T428/31786

  Of polyester [e.g., alkyd, etc.] · CPC title

• C23C16/4415 Primary

  Acoustic wave CVD · CPC title

• Y10T428/31935

  Ester, halide or nitrile of addition polymer · CPC title