Formulations for producing indium oxide-containing layers, process for producing them and their use

Patent metadata

Field	Value
Publication number	US-9812330-B2
Application number	US-201414900821-A
Country	US
Kind code	B2
Filing date	Apr 28, 2014
Priority date	Jun 25, 2013
Publication date	Nov 7, 2017
Grant date	Nov 7, 2017

Abstract

The present invention relates to liquid formulations which can be produced by dissolving at least one indium alkoxide compound which can be prepared by reacting an indium trihalide InX 3 where X=F, Cl, Br, I with a secondary amine of the formula R′ 2 NH where R′=alkyl in a molar ratio of from 8:1 to 20:1 to the indium trihalide in the presence of an alcohol of the generic formula ROH where R=alkyl in at least one solvent, a process for producing them, their use for producing indium oxide-containing or (semi)conducting layers and processes for producing indium oxide-containing layers which use the formulation of the invention.

First claim

The invention claimed is:

1. A liquid formulation, comprising:
at least one solvent; and
at least one indium alkoxide compound dissolved in the at least one solvent and having the formula [In 6 (O)(OR) 12 X 6 ] 2− A m z (ROH) x ,
where R= alkyl, X= F, Cl, Br, and/or I, A= cation, z= valency of the cation, m·z= 2and x= 0 to 10.

2. The liquid formulation according to claim 1 , wherein the indium alkoxide compound has the formula [In 6 (O)(OMe) 12 Cl 6 ] 2− [NH 2 R 2 ] + 2 (MeOH) 2 .

3. The liquid formulation according to claim 1 , wherein the indium alkoxide compound is included in an amount of from 0.1% to 10% by weight based on the total mass of the liquid formulation.

4. The liquid formulation according to claim 1 , wherein the at least one solvent is selected from the group consisting of a primary alcohol, a secondary alcohol, a tertiary alcohol, an aromatic alcohol, an ether, an ester, an aromatic hydrocarbon and a nitrile.

5. The liquid formulation according to claim 1 , wherein the at least one solvent is selected from the group consisting of methanol, ethanol, butanol, tetrahydrofurfuryl alcohol, phenol, 2-methoxyethanol, 1-methoxy-2-propanol, tetrahydrofuran, anisole, butyl acetate, 1-methoxy-2-propyl acetate (PGMEA), ethyl benzoate, ethylene glycol diacetate, ethyl lactate, butyl lactate, toluene, xylene and acetonitrile.

6. The liquid formulation according to claim 5 , comprising at least three solvents;
wherein:
one of the at least three solvents is selected from the group consisting of ethyl lactate, anisole, tetrahydrofurfuryl alcohol, butyl acetate, ethylene glycol diacetate and ethyl benzoate; and
the other two of the at least three solvents have a boiling point difference of at least 30° C. under standard ambient temperature and pressure conditions.

7. The liquid formulation according to claim 1 , comprising three solvents which are ethanol, 1-methoxy-2-propanol and tetrahydrofurfuryl alcohol.

8. The liquid formulation according to claim 1 , being essentially water-free.

9. A process for producing the liquid formulation according to claim 1 , comprising:
dissolving the at least one indium alkoxide compound in the at least one solvent.

10. The liquid formulation according to claim 1 , wherein the indium alkoxide compound is included in an amount of from 0.1% to 5% by weight based on the total mass of the liquid formulation.

11. The liquid formulation according to claim 1 , wherein the indium alkoxide compound is included in an amount of from 0.1% to 2% by weight based on the total mass of the liquid formulation.

12. The liquid formulation according to claim 1 , wherein the at least one solvent is included in an amount of from 95% to 99.5% by weight based on the total mass of the liquid formulation.

13. The liquid formulation according to claim 1 , wherein the at least one solvent is included in an amount of from 98% to 99.5% by weight based on the total mass of the liquid formulation.

14. The liquid formulation according to claim 1 , further comprising:
at least one additive selected from the group consisting of a wetting additive, a defoamer, a crosslinking additive, a surface tension additive, and a levelling additive,
wherein the at least one additive is included in an amount of less than 5% by weight.

15. The liquid formulation according to claim 1 , consisting of the at least one solvent and the at least one indium alkoxide compound.

Assignees

• Evonik Degussa Gmbh

Inventors

• Steiger Juergen
• Merkulov Alexey
• Hoppe Arne

Classifications

• H10P14/3434

  being oxide semiconductor materials (Group IIB-VIA semiconductor materials H10P14/3424) · CPC title

• H10P14/3238

  being insulating materials · CPC title

• H10P14/2905

  Silicon, silicon germanium or germanium · CPC title

• H10P14/265

  using solutions · CPC title

• H10P14/38

  characterised by treatments done after the formation of the materials · CPC title