Vaporization vessel and method
US-12480209-B2 · Nov 25, 2025 · US
Deposition of aluminium only
Deposition of aluminium only · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C23C16/12 |
| Official title | Deposition of aluminium only |
| Display label | Deposition of aluminium only |
| Total patents | 71 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is rapidly growing.
| Year | Patents |
|---|---|
| 2015 | 6 |
| 2016 | 3 |
| 2017 | 6 |
| 2018 | 6 |
| 2019 | 5 |
| 2020 | 10 |
| 2021 | 5 |
| 2022 | 9 |
| 2023 | 3 |
| 2024 | 6 |
| 2025 | 11 |
| 2026 | 1 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Substrate processing apparatus and substrate processing method
US-2024401199-A1 · Dec 5, 2024 · US
Ultralight robust plate materials
US-2024344196-A1 · Oct 17, 2024 · US
Chromium-enriched diffused aluminide coating
US-11987877-B2 · May 21, 2024 · US
Deposition support apparatus and method for coating a component
US-2024141491-A1 · May 2, 2024 · US
Ultralight robust plate materials
US-11939672-B2 · Mar 26, 2024 · US
Vaporization vessel and method
US-2024084452-A1 · Mar 14, 2024 · US
Vaporization vessel and method
US-11821087-B2 · Nov 21, 2023 · US
Process for the generation of metal-containing films
US-11655262-B2 · May 23, 2023 · US
Gas barrier aluminum deposition film and preparation method thereof
US-2023079166-A1 · Mar 16, 2023 · US
Process for the generation of metal-containing films
US-11505562-B2 · Nov 22, 2022 · US
Silicon coating on hard shields
US-11486042-B2 · Nov 1, 2022 · US
Methods and apparatus for high reflectivity aluminum layers
US-11421318-B2 · Aug 23, 2022 · US
Process for the generation of metal-containing films
US-2022220131-A1 · Jul 14, 2022 · US
Aluminum precursor and process for the generation of metal-containing films
US-11377454-B2 · Jul 5, 2022 · US
Ultralight robust plate materials
US-2022154334-A1 · May 19, 2022 · US
Process for the generation of metal-containing films
US-11319332-B2 · May 3, 2022 · US
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
US-2022093386-A1 · Mar 24, 2022 · US
Method for Forming and Patterning Color Centers
US-2022002555-A1 · Jan 6, 2022 · US
Ultralight robust plate materials
US-11198938-B2 · Dec 14, 2021 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC C23C16/12?
- CPC C23C16/12 is the Cooperative Patent Classification code for “Deposition of aluminium only.”
- How many patents are filed under CPC C23C16/12 (Deposition of aluminium only)?
- Our database includes 71 publications tagged with this CPC code.
- Is patent activity under CPC C23C16/12 growing?
- Publication counts under this code: 6 in 2024 vs 11 in 2025 (latest complete years).