Refillable ampoule with purge capability
US-10551004-B2 · Feb 4, 2020 · US
Vaporization vessel and method
US12480209B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12480209-B2 |
| Application number | US-202318380142-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 13, 2023 |
| Priority date | Apr 26, 2019 |
| Publication date | Nov 25, 2025 |
| Grant date | Nov 25, 2025 |
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- Title
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- Abstract
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- Assignees and inventors
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- First independent claim
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Abstract
Official abstract text for this publication.
A tray for a vaporization vessel that includes a tray having a side wall, a bottom plate, one or more apertures that extend through the bottom plate, and a duct that extends through and from the bottom plate. The tray configured to support a solid reagent to be vaporized. A method of assembling the tray that includes forming a first tray that has the side wall and the bottom plate. A vaporization vessel that includes one or more of the trays.
First claim
Opening claim text (preview).
What is claimed is: 1 . A method of assembling a tray of a vaporization vessel, comprising forming the tray which comprises a side wall, a bottom plate, an interior space defined by the side wall and the bottom plate, and one or more apertures that extend through the bottom plate; placing one or more pre-made arms in the tray; and securing the one or more pre-made arms to the tray, with one or more removable fasteners such that the one or more pre-made arms are non-destructibly removable from the tray to allow for cleaning of the tray and the one or more pre-made arms to lower impurity formation during use of the vaporization vessel. 2 . The method of claim 1 further comprising aligning the pre-made arms so that one of apertures in the pre-made arms is provided for each of the apertures in the bottom plate so as to form through-holes each of which extends through the bottom plate and one of the one or more pre-made arms. 3 . The method of claim 1 , where the fastener is a screw. 4 . The method of claim 1 , wherein the tray comprises graphite. 5 . The method of claim 4 , further comprising coating the tray with nickel. 6 . The method of claim 1 , wherein the tray comprises stainless steel. 7 . The method of claim 1 , further comprising loading the tray with precursor material.
Assignees
Inventors
Classifications
using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition (deposition by physical ablation of a target H10P14/6329) · CPC title
Handling or holding of wafers, substrates or devices during manufacture or treatment thereof · CPC title
by cathodic sputtering · CPC title
by cathodic sputtering · CPC title
Coatings or surface treatment on the inside of the reaction chamber or on parts thereof · CPC title
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- What does patent US12480209B2 cover?
- A tray for a vaporization vessel that includes a tray having a side wall, a bottom plate, one or more apertures that extend through the bottom plate, and a duct that extends through and from the bottom plate. The tray configured to support a solid reagent to be vaporized. A method of assembling the tray that includes forming a first tray that has the side wall and the bottom plate. A vaporizati…
- Who is the assignee on this patent?
- Entegris Inc
- What technology area does this patent fall under?
- Primary CPC classification C23C16/4481. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Nov 25 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 9 related publications on this page (citations in our corpus or others sharing the same primary CPC).