Vaporization vessel and method

Patent metadata

Field	Value
Publication number	US-11821087-B2
Application number	US-202016856687-A
Country	US
Kind code	B2
Filing date	Apr 23, 2020
Priority date	Apr 26, 2019
Publication date	Nov 21, 2023
Grant date	Nov 21, 2023

Abstract

A tray for a vaporization vessel that includes a tray having a side wall, a bottom plate, one or more apertures that extend through the bottom plate, and a duct that extends through and from the bottom plate. The tray configured to support a solid reagent to be vaporized. A method of assembling the tray that includes forming a first tray that has the side wall and the bottom plate. A vaporization vessel that includes one or more of the trays.

First claim

What is claimed is:

1. A tray for a vaporization vessel, the tray comprising:
a bottom plate having a surface configured to support a solid reagent;
a side wall;
a plurality of support posts integrated into the side wall, each support post comprising an elastic member extending upwardly beyond a top edge of the side wall;
an interior space defined by the bottom plate and the side wall;
an arm extending along the bottom plate from the side wall; and
a central duct extending through and away from the bottom plate;
wherein the central duct is configured to fluidly connect with at least one other tray stacked on top of or below the first tray to allow a carrier gas to flow through the tray and the first tray is rotated with respect to the at least one other tray stacked on top of or below the first tray such that none of the though-holes on the first tray align with through holes on the at least one other tray stacked on top of or below the first tray, wherein the tray is graphite coated with nickel.

2. The tray of claim 1 , further comprising solid reagent, wherein the solid reagent is a metal halide from a group consisting of aluminum chloride, tungsten chloride, silicon iodide, cadmium chloride, and tantalum chloride.

3. The tray of claim 1 , wherein an inner wall forms the central duct, the inner wall defining a recess for a seal and wherein the seal is made of an elastomeric material configured to be chemically compatible with the carrier gas and the reagent.

4. The tray of claim 1 , wherein an inner wall forms the central duct, the inner wall having an upper surface that extends above a top edge of the side wall.

5. A vaporization vessel comprising:
a housing;
a first tray located within the housing, the first tray comprising: a bottom plate, a side wall, a plurality of support posts integrated into the side wall, each support post comprising an elastic member extending upwardly beyond a top edge of the side wall, one or more through-holes that extend through and above the bottom plate, a first central duct extending through and away from the bottom plate, and a surface for supporting a solid reagent to be vaporized, wherein the first tray is graphite coated with nickel; and
one or more trays each stacked on top of or below the first tray within the vaporizer vessel, the central duct of the first tray fluidly connected with the one or more trays to allow a carrier gas to flow through the one or more trays;
wherein the one or more tray is rotated with respect to an adjacent tray so that none of the one or more through-holes is aligned with a through-hole on the adjacent tray.

6. The vaporization vessel of claim 5 , further comprising:
a seal directly fluidly connecting the first central duct of the first tray and the second central duct of the second tray, the first tray including an inner wall that forms the central duct, and the seal directly contacting the inner wall and the second tray.

7. The vaporization vessel of claim 5 , wherein the seal is made of an elastomeric material configured to be chemically compatible with the carrier gas and the reagent.

8. The vaporization vessel of claim 5 , wherein the vaporizer vessel is configured to provide a stream of reagent gas that contains equal to or less than ten parts per million of metal impurities relative to the amount of vaporized reagent.

9. The tray of claim 1 , comprising a plurality of arms.

10. The tray of claim 1 , wherein the arm is located on a diameter of the tray.

Assignees

• Entegris Inc

Inventors

• Hendrix Bryan C
• Battle Scott L
• Eldridge David J
• Gregg John N
• Thomas Jacob
• Gonzales Manuel F
• Jordan Kenney R
• Olson Benjamin H

Classifications

• H10P14/6334

  using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition (deposition by physical ablation of a target H10P14/6329) · CPC title

• H10P72/00

  Handling or holding of wafers, substrates or devices during manufacture or treatment thereof · CPC title

• C23C16/4583 Primary

  the substrate being supported substantially horizontally · CPC title

• C23C14/185

  by cathodic sputtering · CPC title

• H01L21/02271

  Electricity · mapped topic