Anti-stiction process for MEMS device
US-10513432-B2 · Dec 24, 2019 · US
Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts
Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts · Cooperative Patent Classification (CPC)
Separating, mixing, shaping, printing, and transporting materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | B81C2201/112 |
| Official title | Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts |
| Display label | Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts |
| Total patents | 119 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 8 |
| 2016 | 17 |
| 2017 | 12 |
| 2018 | 9 |
| 2019 | 15 |
| 2020 | 14 |
| 2021 | 6 |
| 2022 | 12 |
| 2023 | 9 |
| 2024 | 8 |
| 2025 | 7 |
| 2026 | 2 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Forming a eutectic bond between a wafer having an anti-stiction coating and a cap wafer
US-10427929-B1 · Oct 1, 2019 · US
Semiconductor device and manufacture thereof
US-2019284044-A1 · Sep 19, 2019 · US
Method of fabricating semiconductor structure
US-2019256347-A1 · Aug 22, 2019 · US
Semiconductor device and manufacture thereof
US-10351421-B2 · Jul 16, 2019 · US
Comb MEMS Device and Method of Making a Comb MEMS Device
US-2019185315-A1 · Jun 20, 2019 · US
Method for manufacturing a micromechanical sensor
US-2019161347-A1 · May 30, 2019 · US
Substrate structure, semiconductor structure and method for fabricating the same
US-10273140-B2 · Apr 30, 2019 · US
Rough layer for better anti-stiction deposition
US-10273141-B2 · Apr 30, 2019 · US
Semiconductive structure and manufacturing method thereof
US-10266395-B2 · Apr 23, 2019 · US
Fence structure to prevent stiction in a mems motion sensor
US-2019062153-A1 · Feb 28, 2019 · US
Anti-stiction process for mems device
US-2019031503-A1 · Jan 31, 2019 · US
Manufacturing method of micro-electro-mechanical systems device
US-10183856-B2 · Jan 22, 2019 · US
Method of stiction prevention by patterned anti-stiction layer
US-2019002273-A1 · Jan 3, 2019 · US
Semiconductor device and manufacture thereof
US-2018265352-A1 · Sep 20, 2018 · US
Method of selectively removing an anti-stiction layer on a eutectic bonding area
US-10053361-B2 · Aug 21, 2018 · US
MEMS structure with graphene component
US-10053358-B2 · Aug 21, 2018 · US
Manufacturing Method of Micro-Electro-Mechanical System Device
US-2018201496-A1 · Jul 19, 2018 · US
Method and Structure for CMOS-MEMS Thin Film Encapsulation
US-2018118560-A1 · May 3, 2018 · US
Semiconductor mems structure
US-2018099865-A1 · Apr 12, 2018 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC B81C2201/112?
- CPC B81C2201/112 is the Cooperative Patent Classification code for “Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts.”
- How many patents are filed under CPC B81C2201/112 (Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts)?
- Our database includes 119 publications tagged with this CPC code.
- Is patent activity under CPC B81C2201/112 growing?
- Publication counts under this code: 8 in 2024 vs 7 in 2025 (latest complete years).