Vacuum process chamber component and methods of making
US-9969022-B2 · May 15, 2018 · US
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Parkhe Vijay D patents
Parkhe Vijay D holds 4 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 4 |
| Recent patents | 0 |
| First publication | Nov 24, 2015 |
| Latest publication | May 15, 2018 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Electrostatic chuck with external flow adjustments for improved temperature distribution
US-9622375-B2 · Apr 11, 2017 · US
Electrostatic chuck with internal flow adjustments for improved temperature distribution
US-9520315-B2 · Dec 13, 2016 · US
Electrostatic chuck with variable pixilated heating
US-9196514-B2 · Nov 24, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Vacuum process chamber component and methods of making
US-9969022-B2 · May 15, 2018 · US
Electrostatic chuck with external flow adjustments for improved temperature distribution
US-9622375-B2 · Apr 11, 2017 · US
Electrostatic chuck with internal flow adjustments for improved temperature distribution
US-9520315-B2 · Dec 13, 2016 · US
Electrostatic chuck with variable pixilated heating
US-9196514-B2 · Nov 24, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P72/72 | 3 |
| H10P72/0434 | 3 |
| H01L21/67109 | 3 |
| H01L21/6831 | 3 |
| H10P72/0602 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 3 |
| Operations & Transport | 2 |
| Cross-Sectional Technologies | 2 |
| Mechanical Engineering | 1 |