Systems for cooling RF heated chamber components
US-9978565-B2 · May 22, 2018 · US
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Paterson Alex patents in 2018
Paterson Alex was listed as an assignee on 2 patent publications in 2018.
| Metric | Value |
|---|---|
| Company | Paterson Alex |
| Year | 2018 |
| Patents | 2 |
Patents
Representative publications for Paterson Alex in 2018.
Powered grid for plasma chamber
US-9966236-B2 · May 8, 2018 · US
Top CPC classifications
Most common classification codes for Paterson Alex in 2018.
| CPC | Patents |
|---|---|
| H01J37/32082 | 1 |
| H01J37/321 | 1 |
| H01J37/32119 | 1 |
| H01J37/32238 | 1 |
| H01J37/32522 | 1 |
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