Internal Faraday shield having distributed chevron patterns and correlated positioning relative to external inner and outer TCP coil
US-9490106-B2 · Nov 8, 2016 · US
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Paterson Alex patents in 2016
Paterson Alex was listed as an assignee on 4 patent publications in 2016.
| Metric | Value |
|---|---|
| Company | Paterson Alex |
| Year | 2016 |
| Patents | 4 |
Patents
Representative publications for Paterson Alex in 2016.
Plasma processing systems including side coils and methods related to the plasma processing systems
US-9336996-B2 · May 10, 2016 · US
Faraday shield having plasma density decoupling structure between TCP coil zones
US-9293353-B2 · Mar 22, 2016 · US
Gas distribution system for ceramic showerhead of plasma etch reactor
US-9245717-B2 · Jan 26, 2016 · US
Top CPC classifications
Most common classification codes for Paterson Alex in 2016.
| CPC | Patents |
|---|---|
| H01J37/321 | 3 |
| H01J37/32651 | 3 |
| H10P50/242 | 3 |
| H01J2237/334 | 2 |
| H01J37/3211 | 2 |
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