Chamber filler kit for plasma etch chamber useful for fast gas switching
US-9679751-B2 · Jun 13, 2017 · US
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Paterson Alex patents in 2017
Paterson Alex was listed as an assignee on 1 patent publication in 2017.
| Metric | Value |
|---|---|
| Company | Paterson Alex |
| Year | 2017 |
| Patents | 1 |
Patents
Representative publications for Paterson Alex in 2017.
Top CPC classifications
Most common classification codes for Paterson Alex in 2017.
| CPC | Patents |
|---|---|
| C23C16/4404 | 1 |
| H01J37/321 | 1 |
| H01J37/32458 | 1 |
| H01J37/32477 | 1 |
| H01L21/30655 | 1 |
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