Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode

Patent metadata

Field	Value
Publication number	US-9869694-B2
Application number	US-201514970237-A
Country	US
Kind code	B2
Filing date	Dec 15, 2015
Priority date	Nov 13, 2008
Publication date	Jan 16, 2018
Grant date	Jan 16, 2018

Abstract

An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.

First claim

What is claimed is:

1. A method of operating a scanning probe microscope, the method comprising:
providing an atomic force microscope (AFM) including a probe having a tip, wherein the material of the entire tip is homogeneous;
providing relative scanning motion between the probe and a sample causing the probe to interact with the sample; and
operating the AFM to collect topography data, mechanical property data and electrical property data with the probe in one of a group including a single pass procedure and a two pass procedure, wherein the homogeneous tip facilitates a repeatability of the operating step for collecting Kelvin Probe Force Microscopy (KPFM) data at less than 50 mV.

2. A method of operating a scanning probe microscope, the method comprising:
providing an atomic force microscope (AFM) including a probe having a tip, wherein the material of the entire tip is homogeneous:
providing relative scanning motion between the probe and a sample causing the probe to interact with the sample: and

operating the AFM to collect topography data, mechanical property data and electrical property data with the probe in a single pass procedure; and
wherein the operating step includes using peak force tapping (PFT) mode to collect the topography data and the mechanical property data.

3. The method of claim 1 , wherein the probe has a spring constant less than 1 N/m.

4. The method of claim 3 , wherein the operating step is a two pass procedure including a first pass and a second pass, and wherein the second pass includes using a high voltage detection circuit to measure a surface potential of the sample greater than ±12 volts.

5. The method of claim 3 , wherein the operating step is a two pass procedure including a first pass and a second pass, and wherein the second pass includes applying an AC bias voltage between the probe and the sample, the AC bias voltage having a frequency lower than one-half the resonant frequency of the probe.

6. A method for measuring multiple properties of a sample, the method comprising:
providing an atomic force microscope (AFM) including a probe having a tip;
operating the AFM to cause the probe to interact with the sample in a one pass procedure; collecting topographic and mechanical property data corresponding to the sample using peak force tapping (PFT) mode; and
collecting electrical property data corresponding to the sample with the probe using Kelvin Probe Force Microscopy (KPFM).

7. The method of claim 6 , wherein the probe has an insulating cantilever with a conductive tip made of a single material on one side, and a conductive coating on the other side made of a pure metal.

8. The method of claim 6 , wherein KPFM is one of amplitude-modulation KPFM and frequency-modulation KPFM.

9. The method of claim 6 , wherein the operating step includes using PFT mode to collect the topography data and the mechanical property data.

10. The method of claim 9 , wherein the operating step is performed as a two pass procedure using LiftMode™, and the topography data collected in a first pass of the two pass procedure is used in the second pass.

11. The method of claim 10 , wherein the second pass includes using FM-KPFM and wherein the FM modulation step includes providing first and second lock-in amplifiers in a cascade configuration.

12. The method of claim 6 , further comprising performing a thermal tuning step to determine the fundamental resonant frequency of the probe.

13. A method of operating an atomic force microscope (AFM) to measure a sample, the method comprising:
providing an AFM including a probe having a tip, wherein the entire tip is made of a homogeneous material;
operating the AFM in peak force tapping (PFT) mode; and collecting Kelvin Probe Force Microscopy (KPFM) data during said operating step.

14. The method of claim 13 , further comprising performing a thermal tuning step to determine the fundamental resonant frequency of the probe.

15. The method of claim 13 , wherein the operating step is performed as a two pass procedure using LiftMode™, and the topography data collected in a first pass of the two pass procedure is used in the second pass.

16. The method of claim 15 , wherein the second pass includes using FM-KPFM and wherein the FM modulation step includes providing first and second lock-in amplifiers in a cascade configuration.

Assignees

• Bruker Nano Inc

Inventors

• Li Chunzeng
• Hu Yan
• Ma Ji
• He Jianli
• Huang Lin
• Minne Stephen C
• Mittel Henry
• Wang Weijie
• Hu Shuiqing
• Su Chanmin

Classifications

• G01Q60/32

  AC mode · CPC title

• G01Q60/34

  Tapping mode · CPC title

• G01Q60/00

  Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof · CPC title

• G01Q60/30

  Scanning potential microscopy · CPC title

• G01Q20/02

  by optical means · CPC title