Device and method for aligning substrates

Patent metadata

Field	Value
Publication number	US-9851645-B2
Application number	US-201314396995-A
Country	US
Kind code	B2
Filing date	Dec 6, 2013
Priority date	Dec 6, 2013
Publication date	Dec 26, 2017
Grant date	Dec 26, 2017

Abstract

A method for aligning and bringing a first substrate into contact with a second substrate as well as a corresponding device with at least four detection units wherein:
at least two first detection units can move at least in the X-direction and in the Y-direction, and at least two second detection units can move exclusively in the Z-direction.

First claim

Having described the invention, the following is claimed:

1. A method for aligning and bringing a first substrate into contact with a second substrate comprising the following steps:
fixing a first substrate to a first holder and the second substrate to a second holder, said second holder being arranged opposite to the first holder, wherein the first and second substrates are arranged between the first and second holders and disposed at a distance A between a first contact surface of the first substrate and a second contact surface of the second substrate,
detecting first markings on the first substrate and second markings on the second substrate by at least four detection units, whereupon:
at least two of said at least four detection units are first detection units that are movable in the X-direction and in the Y-direction, and
at least two of said at least four detection units are second detection units that are movable exclusively in a Z-direction that runs crosswise to the X- and Y-directions,

aligning the first substrate relative to the second substrate in an X-direction and a Y-direction running crosswise thereto by movement of the holders, and
bringing into contact the contact surfaces of the aligned substrates in the Z-direction.

2. A method according to claim 1 , wherein the second substrate that is fixed to the second holder can be moved exclusively in the Z-direction.

3. A method according to claim 1 , wherein the aligning is carried out in a vacuum at less than 1 bar.

4. A method according to claim 1 , wherein the detecting least four detection units are calibrated before the aligning, with at least one first calibrating substrate.

5. A method according to claim 4 , wherein the at least one first calibrating substrate is used for calibrating optical axes of the detection units that can be arranged opposite to each other and/or for calibrating a depth of focus of the detection units relative to the at least one first calibrating substrate.

6. A method according to claim 4 , wherein a second calibrating substrate is used for calibrating the first detection units relative to the movement of the first substrate to the first holder in the X-direction and in the Y-direction.

7. A method according to claim 1 , wherein control and detection of movements of the substrates by means of the holders, control and detection of movement of the detection units, and control and detection of the movement of a contacting means are controlled by a control system.

8. A device for aligning and bringing a first substrate into contact with a second substrate, the device comprising:
a first holder for fixing and moving the first substrate and a second holder for fixing and moving the second substrate, said first holder arranged opposite to said second holder, whereby the first and second substrates are alignable between the first and second holders at a distance A between a first contact surface of the first substrate and a second contact surface of the second substrate in an X-direction, a Y-direction running crosswise thereto, and a Z-direction running crosswise to the X- and Y-directions,
at least two first detection units that are movable at least in the X-direction and in the Y-direction,
at least two second detection units that are movable exclusively in the Z-direction,
contacting means for bringing into contact the first substrate with the second substrate in the Z-direction, and
a control system for controlling and detecting movements of the substrates by means of the holders, movement of the detection units, and movement of the contacting means.

9. A device according to claim 8 , whereby the first holder has an X-translational unit that can move exclusively in a linear manner, a Y-translational unit that can move exclusively in a linear manner, and a Z-translational unit that can move exclusively in a linear manner.

10. A device according to claim 8 , whereby the second holder has a Z-translational unit that can move exclusively in a linear manner.

11. A device according to claim 8 , wherein the first detection units are arranged laterally opposite the first holder and/or the second detection units are arranged laterally opposite the second holder.

12. A device according to claim 8 , wherein the first detection units have an X-translational unit that can move exclusively in a linear manner, a Y-translational unit that can move exclusively in a linear manner, and a Z-translational unit that can move exclusively in a linear manner.

13. A device according to claim 8 , wherein the second detection units have a Z-translational unit that can move exclusively in a linear manner.

14. A device according to claim 8 , wherein at least one of the two first detection units and at least one of the second detection units can be arranged opposite to one another.

Assignees

• Ev Group E Thallner Gmbh

Inventors

• Wagenleitner Thomas

Classifications

• H10P74/238

  comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement · CPC title

• H10P72/0428 Primary

  Apparatus for mechanical treatment or grinding or cutting · CPC title

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/53

  using optical controlling means · CPC title

• G03F9/7088 Primary

  Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection · CPC title