Device for alignment of two substrates

Patent metadata

Field	Value
Publication number	US-9576825-B2
Application number	US-201013497602-A
Country	US
Kind code	B2
Filing date	Aug 26, 2010
Priority date	Sep 22, 2009
Publication date	Feb 21, 2017
Grant date	Feb 21, 2017

Abstract

Device and method for alignment of a first contact surface of a first substrate with a second contact surface of a second substrate which can be held on a second platform. The device includes first X-Y positions of first alignment keys located along the first contact surface, and second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located along the second contact surface, wherein the first contact surface can be aligned based on the first X-Y positions in the first alignment position and the second contact surface can be aligned based on the second X-Y positions in the second alignment position.

First claim

Having described the invention, the following is claimed:

1. Device for alignment of a first contact surface of a first substrate with a second contact surface of a second substrate, said device comprising:
a first platform for holding the first substrate,
a second platform for holding the second substrate,
first detection means configured to detect first X-Y positions of first alignment keys located on the first contact surface of the first substrate in a first X-Y plane in a first X-Y coordinate system which is independent of the motion of the first substrate,
second detection means configured to detect second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located on the second contact surface of the second substrate in a second X-Y plane parallel to the first X-Y plane in a second X-Y coordinate system which is independent of the motion of the second substrate, and
drive means for moving at least one of the first platform and the second platform to align the first contact surface of the first substrate with the second contact surface of the second substrate, wherein the drive means aligns the first contact surface based on the first X-Y positions in a first alignment position and aligns the second contact surface based on the second X-Y positions in a second alignment position,
wherein the first and second X-Y planes in the detection of the first and second X-Y positions are at least quasi-identical to a contacting plane of the first and second contact surfaces during contacting.

2. Device as claimed in claim 1 , wherein first X-Y positions of more than two first alignment keys are detected and aligned with corresponding second alignment keys.

3. Device as claimed in claim 1 , wherein the device further comprises a base, the first and/or second X-Y coordinate system are assigned to the base.

4. Device as claimed in claim 1 , wherein the device further comprises a base, the first and/or the second detection means are fixed on the base during detection and/or alignment and/or contacting.

5. Device as claimed in claim 4 , wherein the first and/or the second detection means are mechanically fixed during detection and/or alignment and/or contacting.

6. Device as claimed in claim 1 , wherein the first and the second X-Y coordinate systems are Cartesian coordinate systems and/or have identical scaling and/or coincide.

7. Device as claimed in claim 1 , wherein the first detection means includes a first alignment key detector and/or the second detection means includes a second alignment key detector.

8. Device as claimed in claim 1 , wherein the first and second X-Y planes in the detection of the first and second X-Y positions are identical to the contacting plane of the first and second contact surfaces during contacting.

9. Device as claimed in claim 1 , wherein said drive means includes a drive unit for moving said first and second platforms in at least the X- and Y-directions.

10. Device as claimed in claim 1 , wherein each of said first and second platforms includes receiving means for temporarily fixing the first and second substrates to the first and second platforms, respectively.

11. Device as claimed in claim 1 , wherein said first contact surface forms the first X-Y plane.

12. Device as claimed in claim 1 , wherein said second contact surface forms the second X-Y plane.

13. Device as claimed in claim 1 , wherein said drive means includes a linear motor.

14. Device for alignment of a first contact surface of a first substrate with a second contact surface of a second substrate, said device comprising:
a first platform for holding the first substrate,
a second platform for holding the second substrate,
first detection means configured to detect first X-Y positions of first alignment keys located on the first contact surface of the first substrate in a first X-Y plane in a first X-Y coordinate system which is independent of the motion of the first substrate,
second detection means configured to detect second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located on the second contact surface of the second substrate in a second X-Y plane parallel to the first X-Y plane in a second X-Y coordinate system which is independent of the motion of the second substrate,
drive means for moving at least one of the first platform and the second platform to align the first contact surface of the first substrate with the second contact surface of the second substrate, wherein the drive means aligns the first contact surface based on the first X-Y positions in a first alignment position and aligns the second contact surface based on the second X-Y positions in a second alignment position, and
test means to calibrate the device by checking alignment of the contacted first and second substrates.

15. Device for alignment of a first contact surface of a first substrate with a second contact surface of a second substrate, said device comprising:
a first platform for holding the first substrate,
a second platform for holding the second substrate,
first detection means configured to detect first X-Y positions of first alignment keys located on the first contact surface of the first substrate in a first X-Y plane in a first X-Y coordinate system which is independent of the motion of the first substrate,
second detection means configured to detect second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located on the second contact surface of the second substrate in a second X-Y plane parallel to the first X-Y plane in a second X-Y coordinate system which is independent of the motion of the second substrate,
drive means for moving at least one of the first platform and the second platform to align the first contact surface of the first substrate with the second contact surface of the second substrate, wherein the drive means aligns the first contact surface based on the first X-Y positions in a first alignment position and aligns the second contact surface based on the second X-Y positions in a second alignment position, and
first and second distance measurement means and actuators for moving the first and second substrates transversely to the X-Y planes without contact with the first and second substrates, said first and second distance measurement means and actuators partially aligning the first and second surfaces.

16. Method for aligning a first contact surface of a first substrate held on a first platform with a second contact surface of a second substrate held on a second platform, said method comprising:
arranging the first contact surface of the first substrate in a first X-Y plane and arranging the second contact surface of the second substrate in a second X-Y plane which is parallel to the first X-Y plane,
detecting first X-Y positions of first alignment keys located on the first contact surface of the first substrate in a first X-Y coordinate system which is independent of the motion of the first substrate, and detecting second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located on the second contact surface of the second substrate in a second X-Y coordinate system independent of the motion of the second substrate, wherein in detecting the first and second X-Y positions, the first and second planes are at least quasi-identical to a contacting plane of the first and second contact surfaces during contacting, and
aligning the first contact surface of the first substrate with the second contact surf

Assignees

• Figura Daniel
• Ev Group E Thallner Gmbh

Inventors

• Figura Daniel

Classifications

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H10P72/53 Primary

  using optical controlling means · CPC title

• H10P72/0428 Primary

  Apparatus for mechanical treatment or grinding or cutting · CPC title

• H01L21/67092 Primary

  Electricity · mapped topic

• H01L21/681

  Electricity · mapped topic