Method of electroplating photoresist defined features from copper electroplating baths containing reaction products of pyrazole compounds and bisepoxides
US-10508349-B2 · Dec 17, 2019 · US
US9850589B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9850589-B2 |
| Application number | US-201514703079-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 4, 2015 |
| Priority date | May 12, 2014 |
| Publication date | Dec 26, 2017 |
| Grant date | Dec 26, 2017 |
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A system and methods are provided for electrochemical grinding a workpiece. In one embodiment, a method includes controlling potentials to grinding tool and the workpiece, controlling applying electrolyte, and controlling grinding of the workpiece by the grinding tool. The method may also include determining screen replacement when there is sufficient metal plated.
Opening claim text (preview).
What is claimed is: 1. An electrochemical grinding tool comprising: a voltage source including an anode and a cathode, the anode being electrically coupled to a workpiece; a grinding wheel having a grinding surface, wherein the grinding wheel is electrically coupled to the cathode of the voltage source, and wherein the grinding wheel includes abrasive material on the grinding surface; and a screen coupled to the grinding wheel, wherein the screen is configured to be electrically coupled to the cathode of the voltage source, wherein the screen is configured to recover material by electroplating removed by the grinding wheel during electrochemical grinding, wherein the screen encircles the grinding wheel and partially encloses the abrasive material on the grinding surface, and wherein a portion of the abrasive material extends radially outward beyond the screen to allow the portion of the abrasive material to engage with the workpiece. 2. The electrochemical grinding tool of claim 1 , wherein the abrasive material includes at least one of a nonconductive material, diamond and aluminum oxide material. 3. The electrochemical grinding tool of claim 1 , wherein the screen is a metal mesh contoured to the grinding surface of the grinding wheel. 4. The electrochemical grinding tool of claim 1 , wherein the screen is a metal mesh disk coupled to an outer surface of the grinding wheel. 5. The electrochemical grinding tool of claim 1 , wherein the screen includes a plurality of openings to allow the portion of the abrasive material of the grinding wheel to engage with the workpiece. 6. The electrochemical grinding tool of claim 1 , wherein the screen is configured to be removable from the grinding wheel. 7. An electrochemical grinding system comprising: a grinding tool including a voltage source including an anode and a cathode, the anode being electrically coupled to a workpiece; a grinding wheel having a grinding surface, wherein the grinding wheel is electrically coupled to the cathode of the voltage source, and wherein the grinding wheel includes abrasive material on the grinding surface; and a screen coupled to the grinding wheel, wherein the screen is configured to be electrically coupled to the cathode of the voltage source, wherein the screen is configured to recover material by electroplating removed by the grinding wheel during electrochemical grinding, wherein the screen encircles the grinding wheel and partially encloses the abrasive material on the grinding surface, and wherein a portion of the abrasive material extends radially outward beyond the screen to allow the portion of the abrasive material to engage with the workpiece; and a controller configured to control the grinding tool for electrochemical grinding of the workpiece. 8. The electrochemical grinding system of claim 7 , wherein the abrasive material includes at least one of a nonconductive material, diamond and aluminum oxide material. 9. The electrochemical grinding system of claim 7 , wherein the screen is a metal mesh contoured to the grinding surface of the grinding wheel. 10. The electrochemical grinding system of claim 7 , wherein the screen is a metal mesh disk coupled an outer surface of the grinding wheel. 11. The electrochemical grinding system of claim 7 , wherein the screen includes a plurality of openings to allow the portion of the abrasive material of the grinding wheel to engage with the workpiece. 12. The electrochemical grinding system of claim 7 , wherein the screen is configured to be removable from the grinding wheel. 13. A method for electrochemical grinding, the method comprising: controlling a potential of a voltage source applied to a grinding tool, wherein the grinding tool includes a screen coupled to a grinding wheel having a grinding surface and abrasive material on the grinding surface, wherein the voltage source includes an anode and a cathode, and wherein the screen is electrically coupled to the cathode of the voltage source; electrically coupling the anode to a workpiece; electrically coupling the grinding wheel to the cathode of the voltage source; encircling the grinding wheel with the screen, wherein the screen partially encloses the abrasive material on the grinding surface and wherein a portion of the abrasive material extends radially outward beyond the screen to allow the portion of the abrasive material to engage with the workpiece; controlling a potential of the voltage source applied to the workpiece; and controlling electrochemical grinding of the workpiece by the grinding tool, wherein the screen is configured to recover material by electroplating removed by the grinding wheel during electrochemical grinding. 14. The method of claim 13 , wherein potential applied to the screen is different than the potential applied to the grinding wheel. 15. The method of claim 13 , wherein controlling of potential applied to the grinding tool includes measuring at least one of current and potential of an electrolyte solution during electrochemical grinding. 16. The method of claim 13 , wherein controlling electrochemical grinding includes controlling potential applied to the screen. 17. The method of claim 13 , wherein controlling electrochemical grinding includes adjusting one or more of the grinding speed, angle and position of the grinding tool. 18. The method of claim 13 , further comprising determining a condition requiring screen replacement.
Electrodes {, e.g. composition, counter electrode} · CPC title
Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects (for both electrolytic coating and removal C25D); Servicing or operating · CPC title
Electrodes (consumable anodes for the refining the metals C25C1/00 - C25C5/00); Connections thereof · CPC title
Electroplating combined with mechanical treatment during the deposition · CPC title
Electrolytic production, recovery or refining of metals by electrolysis of solutions (C25C5/00 takes precedence) · CPC title
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