Film forming method for metal film and film forming apparatus for metal film

Patent metadata

Field	Value
Publication number	US-2019093247-A1
Application number	US-201816135586-A
Country	US
Kind code	A1
Filing date	Sep 19, 2018
Priority date	Sep 28, 2017
Publication date	Mar 28, 2019
Grant date	—

Abstract

A solid electrolyte membrane is disposed between an anode and a substrate, and voltage is applied between the anode and the substrate while the solid electrolyte membrane is pressed onto the substrate so as to form a metal film on the substrate. In this film forming method, there is used the solid electrolyte membrane that includes: a first portion made of an ion permeable material; and a second portion made of a material having an electric insulating property and having a low permeability of metallic ions, the second portion being embedded in the first portion so as to be exposed from a surface of the solid electrolyte membrane, the surface of the solid electrolyte membrane facing the substrate.

First claim

What is claimed is:

1 . A film forming method for a metal film, the method comprising:
supplying a metallic solution containing metallic ions such that the metallic solution comes in contact with a solid electrolyte membrane from an anode side of the solid electrolyte membrane in a state in which the solid electrolyte membrane is disposed between the anode and a substrate; pressing the solid electrolyte membrane to the substrate; and applying voltage between the anode and the substrate in a state in which the solid electrolyte membrane is pressed to the substrate so as to form the metal film deriving from the metallic ions on a surface of the substrate, wherein the solid electrolyte membrane includes: a first portion made of an ion permeable material that the metallic ions permeate; and a second portion made of a material having an electric insulating property and having a lower permeability of the metallic ions than a permeability of the ion permeable material of the first portion, the second portion being embedded in the first portion so as to be exposed from a surface of the solid electrolyte membrane, the surface of the solid electrolyte membrane facing the substrate.

2 . The film forming method for the metal film according to claim 1 , wherein
the solid electrolyte membrane includes the second portion formed such that when the voltage is applied, the metallic ions passing through the first portion pass around the second portion, and a metal of the metallic ions is precipitated on the surface of the substrate, the surface of the substrate facing the second portion.

3 . The film forming method for the metal film according to claim 1 , wherein
the second portion includes portions swelling toward a side where the substrate is disposed.

4 . The film forming method for the metal film according to claim 1 , wherein
the second portion includes multiple fibers.

5 . The film forming method for the metal film according to claim 4 , wherein
the second portion includes multiple fibers extending along one direction with intervals between the fibers, wherein the film forming method comprises: pressing the solid electrolyte membrane to the substrate and applying voltage so as to form the metal film with a stripe pattern including linear first metallic projections where the metal is precipitated, on the surface of the substrate, the surface of the substrate facing the fibers; turning the substrate or the solid electrolyte membrane with the metal film facing the solid electrolyte membrane; and after turning the substrate or the solid electrolyte membrane, by pressing the solid electrolyte membrane to the substrate and applying voltage, forming linear second metallic projections where the metal is precipitated, along a direction intersecting the direction where the first metallic projections extend so as to form the metal film with a grid pattern including the first metallic projections and the second metallic projections.

6 . A film forming apparatus for a metal film, the apparatus comprising:
an anode; a solid electrolyte membrane disposed between the anode and a substrate; a solution storage part storing a metallic solution containing metallic ions such that the metallic solution comes in contact with the solid electrolyte membrane from an anode side of the solid electrolyte membrane; a pressing part pressing the solid electrolyte membrane to the substrate; and an electric power source applying voltage between the anode and the substrate, wherein the film forming apparatus forms the metal film deriving from the metallic ions on a surface of the substrate by applying voltage by the electric power source, wherein the solid electrolyte membrane includes: a first portion made of an ion permeable material that the metallic ions permeate; and a second portion made of a material having an electric insulating property and having a lower permeability of the metallic ions than a permeability of the ion permeable material, the second portion being embedded in the first portion so as to be exposed from a surface of the solid electrolyte membrane, the surface of the solid electrolyte membrane facing the substrate.

7 . The film forming apparatus for the metal film according to claim 6 , wherein
the second portion is formed such that when the voltage is applied, the metallic ions passing through the first portion pass around the second portion, and a metal of the metallic ions is precipitated on the surface of the substrate, the surface of the substrate facing the second portion.

8 . The film forming apparatus for the metal film according to claim 6 , wherein
a surface from which the second portion is exposed includes portions swelling toward a side where the substrate is disposed.

9 . The film forming apparatus for the metal film according to claim 6 , wherein
the second portion includes multiple fibers.

10 . The film forming apparatus for the metal film according to claim 9 , wherein
the second portion includes multiple fibers extending along one direction with intervals between the fibers.

11 . The film forming apparatus for the metal film according to claim 6 , wherein
the solid electrolyte membrane is set to be a first solid electrolyte membrane, and a second solid electrolyte membrane made of an ion permeable material that the metallic ions permeate is stacked on the first solid electrolyte membrane on a side where the second solid electrolyte membrane comes in contact with the metallic solution in the solution storage part.

Assignees

• Toyota Motor Co Ltd

Inventors

• Iisaka Hirofumi

Classifications

• C25D17/001

  Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells · CPC title

• C25D17/008

  Current shielding devices · CPC title

• C25D3/12

  of nickel or cobalt · CPC title

• C25D17/005

  Contacting devices · CPC title

• C25D17/00

  Constructional parts, or assemblies thereof, of cells for electrolytic coating · CPC title