Constant mass flow multi-level coolant path electrostatic chuck

Patent metadata

Field	Value
Publication number	US-9847240-B2
Application number	US-201414178795-A
Country	US
Kind code	B2
Filing date	Feb 12, 2014
Priority date	Feb 12, 2014
Publication date	Dec 19, 2017
Grant date	Dec 19, 2017

Abstract

A workpiece support has a vessel having a top interior wall and a bottom interior wall. An interior cavity is defined between the top interior wall and bottom interior wall, wherein a support surface configured to support a workpiece. A plate is positioned within the interior cavity, dividing the interior cavity into a top cavity and a bottom cavity. The top and bottom cavities are fluidly coupled about a periphery of the plate. A first taper defined in one or more of the top interior wall and a top portion of the plate provides a substantially constant volume across a radial cross-section of the top cavity. A second taper defined in one or more of the bottom interior wall and a bottom portion of the plate provides a substantially constant volume across a radial cross-section of the bottom cavity. First and second ports fluidly couple the top and bottom cavities to respective first and second fluid channels.

First claim

The invention claimed is:

1. A workpiece support, comprising:
a vessel comprising a top interior wall and a bottom interior wall, wherein the top interior wall is disposed opposite the bottom interior wall, therein defining an interior cavity between the top interior wall and bottom interior wall, wherein the vessel further comprises a support surface configured to support a workpiece thereon;
a plate positioned within the interior cavity, wherein the plate divides the interior cavity into a top cavity defined between the plate and the top interior wall and a bottom cavity defined between the plate and the bottom interior wall, and wherein the top cavity and bottom cavity are fluidly coupled to one another about a periphery of the plate;
a first taper defined in one or more of the top interior wall and a top portion of the plate, wherein a first height between the top portion of the plate and the top interior wall decreases as a function of a radius from a center of the interior cavity toward the periphery of the plate;
a second taper defined in one or more of the bottom interior wall and a bottom portion of the plate, wherein a second height between the bottom portion of the plate and the bottom interior wall decreases as a function of the radius from the center of the interior cavity toward the periphery of the plate;
a first port defined in a central portion of the plate, wherein the first port fluidly couples the top cavity to a first fluid channel; and
a second port defined in bottom portion of the vessel, wherein the second port fluidly couples the bottom cavity to a second fluid channel.

2. The workpiece support of claim 1 , wherein the first taper is linear.

3. The workpiece support of claim 1 , wherein the top cavity is substantially conical.

4. The workpiece support of claim 1 , wherein the support surface is substantially planar.

5. The workpiece support of claim 1 , wherein the vessel comprises an electrostatic clamp thermally coupled thereto, wherein a clamping surface of the electrostatic clamp substantially defines the support surface.

6. The workpiece support of claim 1 , wherein a thermal conduction path is defined between the support surface and the interior cavity.

7. The workpiece support of claim 1 , wherein a fluid path is defined within the interior cavity, wherein the first taper and second taper provide a substantially constant mass flow of a fluid through the interior cavity.

8. A workpiece support, comprising:
a vessel, wherein the vessel is substantially cylindrical and comprises a top interior wall and a bottom interior wall, wherein an interior cavity is defined between the top interior wall and bottom interior wall, and wherein a support surface is associated with a top exterior portion of the vessel, wherein the support surface is configured to support a workpiece thereon;
a plate defined within the interior cavity, wherein the plate defines a top cavity between a top portion of the plate and the top interior wall and a bottom cavity between a bottom portion of the plate and the bottom interior wall, and wherein the top cavity and bottom cavity are fluidly coupled to one another about a periphery of the plate;
a first taper defined in one or more of the top interior wall and top portion of the plate, wherein a first height between the top portion of the plate and the top interior wall decreases as a function of a radius from a center of the interior cavity toward the periphery of the plate;
a second taper defined in one or more of the bottom interior wall and bottom portion of the plate, wherein a second height between the bottom portion of the plate and the bottom interior wall decreases as a function of the radius from the center of the interior cavity toward the periphery of the plate;
a first port defined in a central portion of the plate, wherein the first port fluidly couples the top cavity to a first fluid channel; and
a second port defined in a bottom portion of the vessel, wherein the second port fluidly couples the top cavity to a second fluid channel.

9. The workpiece support of claim 8 , further comprising an electrostatic clamp, wherein a clamping surface of the electrostatic clamp substantially defines the support surface.

10. A thermal workpiece support system, comprising:
a vessel comprising a top interior wall and a bottom interior wall, therein defining an interior cavity between the top interior wall and bottom interior wall, wherein the vessel further comprises a support surface configured to support a workpiece thereon;
a plate positioned within the interior cavity, wherein the plate divides the interior cavity into a top cavity defined between the plate and the top interior wall and a bottom cavity defined between the plate and the bottom interior wall, and wherein the top cavity and bottom cavity are fluidly coupled to one another about a periphery of the plate;
a first taper defined in one or more of the top interior wall and a top portion of the plate, wherein a first height between the top portion of the plate and the top interior wall decreases as a function of a radius from a center of the interior cavity toward the periphery of the plate;
a second taper defined in one or more of the bottom interior wall and a bottom portion of the plate, wherein a second height between the bottom portion of the plate and the bottom interior wall decreases as a function of the radius from the center of the interior cavity toward the periphery of the plate;
a first port defined in a central portion of the plate, wherein the first port fluidly couples the top cavity to a first fluid channel;
a second port defined in bottom portion of the vessel, wherein the second port fluidly couples the bottom cavity to a second fluid channel;
a pump, wherein an inlet of the pump is fluidly coupled to one of the first fluid channel and second fluid channel, and wherein an outlet of the pump is fluidly coupled to the other one of the first fluid channel and second fluid channel; and
a thermal unit fluidly coupled to one of the first fluid channel and second fluid channel, wherein the thermal unit comprises one or more of a heater and chiller configured to respectively heat and chill a fluid disposed within the first fluid channel and second fluid channel.

11. The thermal workpiece support system of claim 10 , further comprising a controller configured to control a thermal transfer between the workpiece and the vessel based on a control of one or more of the pump and the thermal unit.

12. The thermal workpiece support system of claim 10 , wherein the vessel further comprises an electrostatic clamp, wherein a clamping surface of the electrostatic clamp substantially defines the support surface.

13. The thermal workpiece support system of claim 10 , wherein a fluid path is defined within the interior cavity, wherein the first taper and second taper provide a substantially constant mass flow of a fluid through the interior cavity.

Assignees

• Axcelis Tech Inc

Inventors

• Lee William Davis

Classifications

• H10P72/72

  using electrostatic chucks · CPC title

• H10W40/60

  Securing means for detachable heating or cooling arrangements, e.g. clamps · CPC title

• H10W40/40

  involving heat exchange by flowing fluids · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• F28D1/06

  with the heat-exchange conduits forming part of, or being attached to, the tank containing the body of fluid · CPC title