Conductive polymer composition, coated article, patterning process, and substrate

Patent metadata

Field	Value
Publication number	US-9817314-B2
Application number	US-201514842463-A
Country	US
Kind code	B2
Filing date	Sep 1, 2015
Priority date	Sep 30, 2014
Publication date	Nov 14, 2017
Grant date	Nov 14, 2017

Abstract

The present invention provides a conductive polymer composition which contains (A) a polyaniline-based conductive polymer having a repeating unit represented by the general formula (1), (B) a polyanion, and (C) an amino acid,

wherein R A1 to R A4 independently represent a hydrogen atom, a halogen atom, or a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 20 carbon atoms and optionally containing a heteroatom; and R A1 and R A2 , or R A3 and R A4 may be bonded to each other to form a ring. There can be provided a conductive polymer composition that has excellent antistatic performance and applicability, dose not adversely affect a resist, and can be suitably used in lithography using electron beam or the like.

First claim

What is claimed is:

1. A conductive polymer composition comprising: (A) a polyaniline-based conductive polymer having a repeating unit represented by the general formula (1); (B) a polyanion; (C) an amino acid; (D) water or solvent; and a nonionic surfactant;

wherein R A1 to R A4 independently represent a hydrogen atom, a halogen atom, or a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 20 carbon atoms and optionally containing a heteroatom; and R A1 and R A2 , or R A3 and R A4 may be bonded to each other to form a ring,
wherein component (C) is selected from the group consisting of the amino acids shown below:

2. The conductive polymer composition according to claim 1 , wherein the component (C) is in an amount of 1 to 50 parts by mass based on 100 parts by mass of a composite of the component (A) and the component (B).

3. The conductive polymer composition according to claim 1 , wherein the component (C) is in an amount of 3 to 10 parts by mass based on 100 parts by mass of a composite of the component (A) and the component (B).

4. The conductive polymer composition according to claim 1 , wherein the nonionic surfactant is in an amount of 1 to 50 parts by mass based on 100 parts by mass of a composite of the component (A) and the component (B).

5. An antistatic film formed using the conductive polymer composition according to claim 1 .

6. A coated article comprising:
a body to be processed; and
an antistatic film formed on the body to be processed using the conductive polymer composition according to claim 1 .

7. The coated article according to claim 6 , wherein the body to be processed is a substrate having a chemically amplified resist film.

8. The coated article according to claim 7 , wherein the substrate is configured so that a resist pattern is formed on the substrate when the substrate is exposed to pattern irradiation with an electron beam.

9. A patterning process comprising the steps of:
providing a substrate having a chemically amplified resist film;
forming an antistatic film on a chemically amplified resist film using the conductive polymer composition according to claim 1 ;
irradiating in a pattern with electron beam; and
developing with an alkaline developer to obtain a resist pattern.

10. A substrate that has a resist pattern obtained by the patterning process according to claim 9 .

Assignees

• Shinetsu Chemical Co

Inventors

• Nagasawa Takayuki
• Hatakeyama Jun

Classifications

• C07C229/06

  having only one amino and one carboxyl group bound to the carbon skeleton · CPC title

• C12P13/08

  Lysine; Diaminopimelic acid; Threonine; Valine · CPC title

• G03F7/093 Primary

  characterised by antistatic means, e.g. for charge depletion · CPC title

• G03F7/039

  Macromolecular compounds which are photodegradable, e.g. positive electron resists (G03F7/075 takes precedence; macromolecular quinonediazides G03F7/023) · CPC title

• C07C227/02

  Formation of carboxyl groups in compounds containing amino groups, e.g. by oxidation of amino alcohols · CPC title