Multi-layer fin field effect transistor devices and methods of forming the same

Patent metadata

Field	Value
Publication number	US-9793403-B2
Application number	US-201615054469-A
Country	US
Kind code	B2
Filing date	Feb 26, 2016
Priority date	Apr 14, 2015
Publication date	Oct 17, 2017
Grant date	Oct 17, 2017

Abstract

Multi-layer fin field effect transistor devices and methods of forming the same are provided. The devices may include a fin shaped channel structure on a substrate. The channel structure may include stressor layers stacked on the substrate and a channel layer between the stressor layers, and the stressor layers may include a semiconductor material having a wide bandgap that is sufficient to confine carriers to the channel layer and having a lattice constant different from a lattice constant of the channel layer to induce stress in the channel layer. The devices may also include source/drain regions on respective first opposing sides of the channel structure and a gate on second opposing sides of the channel structure and between the source/drain regions.

First claim

That which is claimed:

1. A field effect transistor, comprising:
a fin shaped channel structure on a substrate, the channel structure comprising stressor layers stacked on the substrate and a channel layer between the stressor layers, the stressor layers comprising a semiconductor material having a wide bandgap that is sufficient to confine carriers to the channel layer and having a lattice constant different from a lattice constant of the channel layer to induce stress in the channel layer, and the channel structure comprising a top surface parallel to an upper surface of the substrate;
source/drain regions on respective first opposing sides of the channel structure;
a gate on second opposing sides of the channel structure and between the source/drain regions, wherein the second opposing sides of the channel structure extend from the top surface of the channel structure toward the substrate; and
a gate insulating layer extending between the channel structure and the gate, the gate insulating layer comprising a dielectric layer.

2. The field effect transistor of claim 1 , further comprising diffusion barrier layers between the channel layer and the stressor layers.

3. The field effect transistor of claim 2 , wherein each of the diffusion barrier layers comprises Zinc sulfide (ZnS) and/or a group II-VI semiconductor material.

4. The field effect transistor of claim 1 , wherein the field effect transistor comprises an N-type field effect transistor,
wherein the channel layer comprises silicon, and
wherein each of the stressor layers comprises beryllium telluride (BeTe), aluminum arsenide (AlAs), lanthanum oxide (La 2 O 3 ) and/or zinc selenide (ZnSe).

5. The field effect transistor of claim 1 , wherein the field effect transistor comprises a P-type field effect transistor,
wherein the channel layer comprises silicon germanium (Si 1−x Ge x ), and x is greater than 0.2, and
wherein each of the stressor layers comprises aluminum phosphide (AlP) and/or gallium phosphide (GaP).

6. The field effect transistor of claim 1 , wherein the field effect transistor comprises a P-type field effect transistor,
wherein the channel layer comprises silicon germanium (Si 1−x Ge x ), and
wherein each of the stressor layers comprises beryllium sulfide (BeS) and/or beryllium selenide (BeSe).

7. The field effect transistor of claim 1 , wherein the field effect transistor comprises a P-type field effect transistor,
wherein the channel layer comprises indium-gallium-antimonide (In x Ga 1−x Sb), and
wherein each of the stressor layers comprises In y Ga 1−y Sb, and x is greater than y.

8. The field effect transistor of claim 1 , wherein the field effect transistor comprises a P-type field effect transistor,
wherein the channel layer comprises In x Ga 1−x Sb, and
wherein each of the stressor layers comprises aluminum antimonide (AlSb) and/or indium phosphide (InP).

9. The field effect transistor of claim 1 , wherein the gate surrounds the channel structure.

10. The field effect transistor of claim 1 , wherein opposing sides of the channel layer comprise the second opposing sides of the channel structure, respectively, and
wherein the gate insulating layer directly contacts the opposing sides of the channel layer.

11. The field effect transistor of claim 1 , wherein the stressor layers comprise a plurality of stressor layers, the channel layer comprises a plurality of channel layers, and the plurality of stressor layers and the plurality of channel layers are stacked on the substrate in an alternating sequence, and
wherein the gate is not disposed between ones of the plurality of channel layers.

12. The field effect transistor of claim 11 , wherein each of the plurality of channel layers has a thickness in a vertical direction that is perpendicular to the upper surface of the substrate in a range of about 4 nm to about 20 nm.

13. A field effect transistor, comprising:
a fin shaped channel structure on a substrate, the channel structure comprising stressor layers stacked on the substrate and a channel layer between the stressor layers, the stressor layers having a lattice constant different from a lattice constant of the channel layer to induce stress in the channel layer, and the channel structure comprising a top surface parallel to an upper surface of the substrate;
source/drain regions on respective first opposing sides of the channel structure;
a gate on second opposing sides of the channel structure and between the source/drain regions, wherein the second opposing sides of the channel structure extend from the top surface of the channel structure toward the substrate, and
wherein a portion of the gate separates the channel structure from the substrate; and
a gate insulating layer extending between the channel structure and the gate, the gate insulating layer comprising a dielectric layer.

14. The field effect transistor of claim 13 , further comprising diffusion barrier layers between the channel layer and the stressor layers.

15. The field effect transistor of claim 14 , wherein each of the diffusion barrier layers comprises zinc sulfide (ZnS) and/or a group II-VI semiconductor material.

16. The field effect transistor of claim 13 , wherein the field effect transistor comprises an N-type field effect transistor,
wherein the channel layer comprises silicon, and
wherein each of the stressor layers comprises beryllium telluride (BeTe), aluminum arsenide (AlAs), lanthanum oxide (La 2 O 3 ) and/or zinc selenide (ZnSe).

17. The field effect transistor of claim 13 , wherein the field effect transistor comprises a P-type field effect transistor,
wherein the channel layer comprises silicon germanium (Si 1−x Ge x ), and x is greater than 0.2, and
wherein each of the stressor layers comprises aluminum phosphide (AlP) and/or gallium phosphide (GaP).

18. The field effect transistor of claim 13 , wherein the field effect transistor comprises a P-type field effect transistor,
wherein the channel layer comprises silicon germanium (Si 1−x Ge x ), and
wherein each of the stressor layers comprises beryllium sulfide (BeS) and/or beryllium selenide (BeSe).

19. The field effect transistor of claim 13 , wherein the field effect transistor comprises a P-type field effect transistor,
wherein the channel layer comprises indium-gallium-antimonide (In x Ga 1−x Sb), and
wherein each of the stressor layers comprises In y Ga 1−y Sb, and x is greater than y.

20. The field effect transistor of claim 13 , wherein the field effect transistor comprises a P-type field effect transistor,
wherein the channel layer comprises indium-gallium-antimonide (In x Ga 1−x Sb), and
wherein each of the stressor layers comprises aluminum antimonide (AlSb) and/or indium phosphide (InP).

Assignees

• Obradovic Borna J
• Bowen Robert C
• Rakshit Titash
• Wang Wei-E
• Rodder Mark S
• Samsung Electronics Co Ltd

Inventors

• Obradovic Borna J
• Bowen Robert C
• Rakshit Titash
• Wang Wei-E
• Rodder Mark S

Classifications

• H01L29/7849 Primary

  Electricity · mapped topic

• H01L29/78648

  Electricity · mapped topic

• H01L29/66795

  Electricity · mapped topic

• H01L29/0673

  Electricity · mapped topic

• H01L29/1054

  Electricity · mapped topic