UV cleaning device of glass substrate

Patent metadata

Field	Value
Publication number	US-9786699-B2
Application number	US-201514771208-A
Country	US
Kind code	B2
Filing date	Jul 1, 2015
Priority date	Jun 12, 2015
Publication date	Oct 10, 2017
Grant date	Oct 10, 2017

Abstract

The present invention provides an UV cleaning device of a glass substrate, comprising a lamp box, an UV lamp positioned above inside the lamp box, a transparent shield positioned under the UV lamp, a humidifier positioned under the transparent shield and a power exhaust device under the transparent shield and opposite to the humidifier; in usage, the glass substrate is conveyed to be inside the lamp box, and UV light generated by the UV lamp irradiates on the glass substrate through the shield to clean the glass substrate and a humidity and an oxygen content inside the lamp box are adjusted with the humidifier to make a surface of the glass substrate adsorb one layer of water molecules. The electrons generated as the UV light cleans can be gradually conducted and led out with water molecules to effectively restrain the accumulation of the electrostatic to reduce the phenomenon of electrostatic damage, and meanwhile, the increase of the oxygen content makes the concentration of the activated oxygen atoms increases along with. Accordingly, the result of cleaning the organic objects with the UV light is promoted.

First claim

What is claimed is:

1. An UV cleaning device of a glass substrate, comprising a lamp box, an UV lamp positioned above inside the lamp box, a transparent shield positioned under the UV lamp, a humidifier positioned under the transparent shield and a power exhaust device under the transparent shield and opposite to the humidifier;
in usage, the glass substrate is conveyed to be inside the lamp box, and UV light generated by the UV lamp irradiates on the glass substrate through the shield to clean the glass substrate and a humidity and an oxygen content inside the lamp box are adjusted with the humidifier;
wherein the humidifier and the power exhaust device are respectively positioned above two sides of the glass substrate parallel with a conveying direction of the glass substrate; an airflow direction of the humidifier is parallel with and close to a surface of the glass substrate;
wherein a transparent hydrophobic coating is overlaid on one side of the shield close to the glass substrate;
wherein the humidifier respectively exports water vapor, oxygen, nitride to adjust the humidity and the oxygen content inside the lamp box;
wherein the UV cleaning device further comprises a tester for testing the air humidity and the oxygen content inside the lamp box, and the tester is positioned near the humidifier.

2. The UV cleaning device of the glass substrate according to claim 1 , wherein a wavelength of the UV light irradiated by the UV lamp is 172 nm.

3. The UV cleaning device of the glass substrate according to claim 1 , wherein an exhaust flow of the power exhaust device is adjustable.

4. The UV cleaning device of the glass substrate according to claim 1 , wherein in usage, the humidity and the oxygen content inside the lamp box are adjusted according to an electrostatic resistance of the glass substrate.

5. An UV cleaning device of a glass substrate, comprising a lamp box, an UV lamp positioned above inside the lamp box, a transparent shield positioned under the UV lamp, a humidifier positioned under the transparent shield and a power exhaust device under the transparent shield and opposite to the humidifier;
in usage, the glass substrate is conveyed to be inside the lamp box, and UV light generated by the UV lamp irradiates on the glass substrate through the shield to clean the glass substrate and a humidity and an oxygen content inside the lamp box are adjusted with the humidifier;
wherein the humidifier and the power exhaust device are respectively positioned above two sides of the glass substrate parallel with a conveying direction of the glass substrate; an airflow direction of the humidifier is parallel with and close to a surface of the glass substrate;
wherein a wavelength of the UV light irradiated by the UV lamp is 172 nm;
wherein, a transparent hydrophobic coating is overlaid on one side of the shield close to the glass substrate;
wherein the humidifier respectively exports water vapor, oxygen, nitride to adjust the humidity and the oxygen content inside the lamp box;
wherein, the UV cleaning device of the glass substrate further comprises a tester for testing the air humidity and the oxygen content inside the lamp box, and the tester is positioned near the humidifier.

6. The UV cleaning device of the glass substrate according to claim 5 , wherein an exhaust flow of the power exhaust device is adjustable.

7. The UV cleaning device of the glass substrate according to claim 5 , wherein in usage, the humidity and the oxygen content inside the lamp box are adjusted according to an electrostatic resistance of the glass substrate.

Assignees

• Shenzhen China Star Optoelect

Inventors

• Yao Jiangbo

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0411

  for wet cleaning or washing · CPC title

• H10P70/50

  characterised by the part to be cleaned · CPC title

• H10P70/27

  during, before or after processing of conductive materials, e.g. polysilicon or amorphous silicon layers · CPC title

• B08B7/0057 Primary

  by ultraviolet radiation · CPC title