Branched nanowires and method of fabrication

Patent metadata

Field	Value
Publication number	US-9765445-B2
Application number	US-201314092720-A
Country	US
Kind code	B2
Filing date	Nov 27, 2013
Priority date	Nov 27, 2012
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

A new set of branched nanowire or nanotree structures and their fabrication process. Some structures have one or more of the following distinctions from other branched nanowires: (1) the trunk and branch diameter and branching number density can be changed along the trunk's length; (2) the branch's azimuthal direction can be controlled along the trunk's length; (3) the branch's diameter can be modulated along its length; (4) the crystal orientation and branches of the ensemble of nanowires can be aligned on a non-epitaxially matched substrate. The structures are made by a geometrically controlled kinetic growth method.

First claim

The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows:

1. A method of producing branched nanowires comprising:
exposing a substrate to a directional vapor flux, the vapor flux comprising a growth material, the substrate being exposed to the vapor flux under conditions of vapor-liquid-solid growth of the branched nanowires, the conditions including a temperature of the substrate, the vapor flux having a deposition angle representing the angle between a normal direction of the substrate and the direction of the vapor flux, an azimuthal angle representing an angle of the projection of the direction of the vapor flux in the plane perpendicular to the normal direction of the substrate, and a flux rate;
varying at least one of the deposition angle, the azimuthal angle, the flux rate and the temperature to control a property of the branched nanowires; and
in which the branched nanowires have crystal facets and at least one of the deposition angle, the azimuthal angle and the flux rate is controlled to selectively and sequentially direct the vapor flux to a subset of the crystal facets of a nanowire of the branched nanowires.

2. The method of claim 1 used to align in azimuth a plurality of the branched nanowires.

3. The method of claim 2 in which the alignment of the plurality of nanowires changes with height.

4. The method of claim 1 in which at least an additional source of vapor flux is used.

5. The method of claim 4 in which at least one of the orientation, position, flux rate and material of the at least an additional vapor source varies in time.

6. The method of claim 1 in which the nanowires are grown on a substrate with an epitaxial relationship to the nanowires' growth material.

7. The method of claim 1 in which the nanowires are grown on a substrate without an epitaxial relationship to the nanowires' growth material.

8. The method of claim 1 in which the substrate is one of a semiconductor, glass, smooth thin film, columnar thin film, or nanostructured thin film.

9. The method of claim 1 in the substrate has surface properties causing the nanowires to cluster in a region of the substrate.

10. The method of claim 9 in which the surface properties of the substrate are geometrically designed to invoke a specific behavior in the growing nanowires.

11. The method of claim 1 in which the azimuthal direction of the vapor flux rotates continuously clockwise or continuously counterclockwise.

12. The method of 1 in which the azimuthal direction of the vapor flux oscillates with an amplitude between 1 degree and 359 degrees.

13. The method of claim 1 in which the azimuthal direction of the vapor flux changes discretely.

Assignees

• Univ Alberta

Inventors

• Tucker Ryan Thomas
• Beaudry Allan Leo
• Laforge Joshua Michael
• Taschuk Michael Thomas
• Brett Michael Julian

Classifications

• C30B11/12 Primary

  Vaporous components, e.g. vapour-liquid-solid-growth · CPC title

• Y10T428/2922

  Nonlinear [e.g., crimped, coiled, etc.] · CPC title

• C30B29/66

  Crystals of complex geometrical shape, e.g. tubes, cylinders · CPC title

• C30B29/60

  characterised by shape · CPC title

• C30B29/607

  Chemistry & Metallurgy · mapped topic