Heat treatment apparatus

Patent metadata

Field	Value
Publication number	US-9759489-B2
Application number	US-201314023093-A
Country	US
Kind code	B2
Filing date	Sep 10, 2013
Priority date	Sep 13, 2012
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

A heat treatment apparatus includes: a reaction tube processing a plurality of substrates; a support member supporting the reaction tube; a flange protruding outwardly from a lower end of the reaction tube: a concave portion formed in an outer periphery of the flange; and a rotatable roller installed in a top surface of the support member. The rotatable roller engages the concave portion and positions the reaction tube in a circumferential direction.

First claim

What is claimed is:

1. A heat treatment apparatus, comprising:
a reaction tube configured to process a plurality of substrates and having an inner tube and an outer tube, the inner tube including: a flange protruding outwardly from a lower end of the inner tube, and a concave portion formed in a portion of an outer peripheral side surface of the flange and having a curved surface formed in a sidewall of the concave portion;
a manifold configured to support the outer tube;
a support ring fixed to the manifold and configured to support the inner tube by mounting the flange of the inner tube on the support ring, the support ring having a stepped portion which includes a horizontal surface on which the flange of the inner tube is mounted and a vertical surface coming into contact with the outer periphery of the flange and positioning the flange in a radial direction; and
a rotatable roller rotatably installed on the support ring by fixing a fixed pin as a rotation axis of the rotatable roller to the support ring such that a portion of the rotatable roller is positioned at a side of the stepped portion of the support ring,
wherein the flange of the inner tube is mounted on the support ring such that the rotatable roller is centered in a space provided by the concave portion of the flange and in contact with the curved surface formed in the sidewall of the concave portion of the flange.

2. The heat treatment apparatus of claim 1 , wherein the horizontal surface of the support ring has a center line average roughness (Ra) of 0.8 to 3.2.

3. The heat treatment apparatus of claim 1 , further comprising a gas introduction space member radially protruding outward from the inner tube and extending vertically,
wherein the gas introduction space member receives a gas introduction unit.

4. The heat treatment apparatus of claim 3 , wherein a protruding length of the gas introduction space member is shorter than a protruding length of the flange of the inner tube.

5. The heat treatment apparatus of claim 1 , wherein an outer edge of the flange has a substantially circle shape.

6. The heat treatment apparatus of claim 1 , further comprising an anti-inversion ring installed in the support ring and covering an upper portion of the flange of the inner tube,
wherein the anti-inversion ring includes a plurality of partial rings separated from each other.

7. The heat treatment apparatus of claim 6 , wherein the anti-inversion ring is disposed and fixed such that they are symmetric with respect to a diameter of the inner tube passing the gas introduction space member.

Assignees

• Tokyo Electron Ltd

Inventors

• Kaneko Hirofumi

Classifications

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0434

  mainly by convection · CPC title

• C23C16/54

  Apparatus specially adapted for continuous coating · CPC title

• F27D1/0023 Primary

  Linings or walls comprising expansion joints or means to restrain expansion due to thermic flows · CPC title

• C23C16/4409 Primary

  characterised by sealing means · CPC title