Heat treatment apparatus

Patent metadata

Field	Value
Publication number	US-10465986-B2
Application number	US-201715670389-A
Country	US
Kind code	B2
Filing date	Aug 7, 2017
Priority date	Sep 13, 2012
Publication date	Nov 5, 2019
Grant date	Nov 5, 2019

Abstract

A heat treatment apparatus includes: a reaction tube processing a plurality of substrates; a support member supporting the reaction tube; a flange protruding outwardly from a lower end of the reaction tube: a concave portion formed in an outer periphery of the flange; and a rotatable roller installed in a top surface of the support member. The rotatable roller engages the concave portion and positions the reaction tube in a circumferential direction.

First claim

What is claimed is:

1. A heat treatment apparatus, comprising:
a reaction tube configured to process a plurality of substrates;
a support member configured to support the reaction tube;
a flange protruding outwardly from a lower end of the reaction tube:
a concave portion formed in an outer periphery of the flange; and
a rotatable roller installed at a top surface of the support member,
wherein the rotatable roller engages the concave portion and positions the reaction tube in a circumferential direction,
wherein the support member includes a manifold,
wherein an upper end flange is formed in an upper end of the manifold and has a stepped portion on which the reaction tube is mounted,
wherein the rotatable roller is installed in the upper end flange, and
wherein the stepped portion includes a horizontal surface on which the flange is mounted and a vertical surface coming into contact with the outer periphery of the flange and positioning the flange in a radial direction.

2. A heat treatment apparatus, comprising:
a reaction tube configured to process a plurality of substrates;
a support member configured to support the reaction tube;
a flange protruding outwardly from a lower end of the reaction tube:
a concave portion formed in an outer periphery of the flange; and
a rotatable roller installed at a top surface of the support member,
wherein the rotatable roller engages the concave portion and positions the reaction tube in a circumferential direction,
wherein the support member includes a flange holding member having a ring shape, the reaction tube being mounted on the flange holding member,
wherein a stepped portion is formed on a top surface of the flange holding member,
wherein the rotatable roller is installed in the flange holding member, and
wherein the stepped portion includes a horizontal surface on which the flange is mounted and a vertical surface coming into contact with the outer periphery of the flange and positioning the flange in a radial direction.

3. The heat treatment apparatus of claim 2 , further comprising an upper flange holding member installed in the flange holding member,
wherein the flange is supported between the flange holding member and the upper flange holding member, and
wherein the rotatable roller is rotatably supported by a fixed pin installed in the upper flange holding member.

Assignees

• Tokyo Electron Ltd

Inventors

• Kaneko Hirofumi

Classifications

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0434

  mainly by convection · CPC title

• F27D7/02

  Supplying steam, vapour, gases or liquids · CPC title

• F27D1/0023 Primary

  Linings or walls comprising expansion joints or means to restrain expansion due to thermic flows · CPC title

• C23C16/54

  Apparatus specially adapted for continuous coating · CPC title