Visual feedback for process control in RTP chambers
US-10109514-B2 · Oct 23, 2018 · US
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Fox Colin patents
Fox Colin is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Fox Colin |
| Total patents | 4 |
| First publication | Feb 12, 2015 |
| Latest publication | Oct 23, 2018 |
Notable patents
Publications ranked by popularity score, then publication date.
Visual feedback for process control in rtp chambers
US-2017345693-A1 · Nov 30, 2017 · US
Visual feedback for process control in RTP chambers
US-9735034-B2 · Aug 15, 2017 · US
Visual feedback for process control in rtp chambers
US-2015041453-A1 · Feb 12, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0436 | 4 |
| H10P72/0602 | 4 |
| H01L21/67248 | 4 |
| H01L21/67115 | 4 |