Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods

Patent metadata

Field	Value
Publication number	US-9698041-B2
Application number	US-201414299850-A
Country	US
Kind code	B2
Filing date	Jun 9, 2014
Priority date	Jun 9, 2014
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

Substrate temperature control apparatus including optical fiber temperature control are described. Substrate temperature control apparatus includes a base, a thermal contact member proximate to the base, and a plurality of optical fibers adapted to provide light-based heating extending laterally between the base and thermal contact member. Substrate temperature control systems and electronic device processing systems and methods including optical fiber temperature control are described, as are numerous other aspects.

First claim

The invention claimed is:

1. A substrate temperature control apparatus, comprising:
a base;
a thermal contact member proximate to the base, the thermal contact member is configured to provide heating of a substrate in thermal contact with the thermal contact member; and
a plurality of optical fibers adapted to provide light-based heating extending laterally between the base and the thermal contact member, the plurality of optical fibers entering as a bundle into a space between the base and the thermal contact member through a passage through the base.

2. The substrate temperature control apparatus of claim 1 , wherein the plurality of optical fibers terminate at multiple radial locations between the thermal contact member and the base.

3. The substrate temperature control apparatus of claim 1 , wherein the base includes thermal control.

4. The substrate temperature control apparatus of claim 1 , wherein the base comprises a conductive metal.

5. The substrate temperature control apparatus of claim 1 , wherein the thermal contact member comprises a ceramic.

6. The substrate temperature control apparatus of claim 1 , wherein the plurality of optical fibers pass through a ferrule mounted to the base.

7. The substrate temperature control apparatus of claim 1 , comprising an intermediate member positioned between the base and the thermal contact member.

8. The substrate temperature control apparatus of claim 1 , comprising an intermediate member positioned between the base and the thermal contact member, and a first bonding layer between the intermediate member and the base.

9. The substrate temperature control apparatus of claim 8 , wherein the first bonding layer comprises a ceramic-loaded elastomer.

10. The substrate temperature control apparatus of claim 8 , comprising a second bonding layer between the intermediate member and the thermal contact member and wherein the plurality of optical fibers extend laterally between the intermediate member and the thermal contact member.

11. The substrate temperature control apparatus of claim 10 , wherein the second bonding layer comprises a ceramic adhesive and a ceramic loaded elastomer.

12. The substrate temperature control apparatus of claim 8 , wherein the plurality of optical fibers are encapsulated in a ceramic adhesive.

13. A substrate temperature control system, comprising:
an optical heating system including:
a substrate temperature control apparatus including a base and a thermal contact member, and a plurality of optical fibers extending laterally between the base and the thermal contact member, wherein the thermal contact member is configured to provide heating of a substrate in thermal contact with the thermal contact member and the plurality of optical fibers enter into a space between the base and the thermal contact member through a multi-lumen extension,
a plurality of light sources coupled to at least some of the plurality of optical fibers, and
an optical controller adapted to control light intensity in the plurality of optical fibers; and

a temperature unit coupled to the substrate temperature control apparatus and adapted to provide temperature control in addition to that provided by controlling the light intensity in the plurality of optical fibers.

14. An electronic device processing system, comprising:
a process chamber adapted to carry out a process on a substrate;
a substrate temperature control apparatus within the process chamber, the substrate temperature control apparatus including a base and a thermal contact member adapted to be in thermal contact with the substrate wherein the thermal contact member is configured to provide heating of the substrate, an intermediate member positioned between the base and the thermal contact member, a first bonding layer comprising a ceramic-loaded elastomer between the intermediate member and the base, and a plurality of optical fibers extending laterally between the base and the thermal contact member; and
a temperature controller coupled to the plurality of optical fibers and adapted to control light intensity in the plurality of optical fibers to provide temperature control of the thermal contact member.

15. The electronic device processing system of claim 14 , wherein the plurality of optical fibers enter as a bundle into a space between the base and the thermal contact member through a passage through the base.

16. The electronic device processing system of claim 14 , wherein the plurality of optical fibers enter into a space between the base and the thermal contact member through a multi-lumen extension.

17. The electronic device processing system of claim 14 wherein the temperature controller comprises a plurality of laser diodes coupled to the at least some of the plurality of optical fibers.

18. The electronic device processing system of claim 14 further comprising a temperature unit coupled to the substrate temperature control apparatus and adapted to provide temperature control in addition to that provided by controlling the light intensity in the plurality of optical fibers.

19. A method of processing substrates, comprising:
providing a substrate temperature control apparatus including a base, a thermal contact member proximate to the base, an intermediate member positioned between the base and the thermal contact member, and a first bonding layer between the intermediate member and the base, and a plurality of optical fibers encapsulated in a ceramic adhesive extending laterally between the base and the thermal contact member; and
controlling light intensity provided to at least some of the plurality of optical fibers to accomplish light-based temperature control of the thermal contact member and provide heating of a substrate in thermal contact with the thermal contact member.

20. The method of claim 19 , comprising heating or cooling the substrate temperature control apparatus by way of a coupled temperature unit.

Assignees

• Applied Materials Inc

Inventors

• Busche Matthew
• Boyd Jr Wendell
• Parkhe Vijay D
• Rice Michael R
• Volfovski Leon

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H10P72/7604 Primary

  the wafers being placed on a susceptor, stage or support · CPC title