Methods for operating a FinFET SRAM array

Patent metadata

Field	Value
Publication number	US-9659634-B2
Application number	US-201414514225-A
Country	US
Kind code	B2
Filing date	Oct 14, 2014
Priority date	Dec 6, 2011
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

A method of operating an SRAM array may include: providing a plurality of bit cells, each of the plurality of bit cells comprising a cross coupled inverter pair; a first pass gate; and a second pass gate. A word line voltage may be applied to the first pass gate and the second pass gate, while a first cell positive voltage supply CVdd may be applied to terminals of the cross coupled inverter pair. The first cell positive voltage supply CVdd may be varied relative to the word line voltage during a selected operation of the plurality of bit cells.

First claim

What is claimed is:

1. A method comprising:
applying a first voltage level to a first array of bit cells, the bit cells of the first array including only single fin finFET transistors formed on a substrate, and to a second array of bit cells, the bit cells of the second array including single fin finFET transistors and multiple fin finFET transistors formed on the substrate;
applying a word line voltage to a word line associated with the first array of bit cells; and
varying the first voltage level applied to the first array of bit cells during an operation to write data to the first array of bit cells.

2. The method of claim 1 , further comprising lowering the first voltage level applied to both the first array of bit cells and the second array of bit cells during a standby cycle.

3. The method of claim 2 , wherein the first voltage level is lowered to a level of about 200 millivolts to about 600 millivolts.

4. The method of claim 1 , further comprising increasing the first voltage level applied to the first array of bit cells to a level higher than the word line voltage during an operation to read data from the first array of bit cells.

5. The method of claim 1 , further comprising maintaining the first voltage level at a level approximately equal to the word line voltage during an operation to write data to the second array of bit cells and an operation to read data from the second array of bit cells.

6. The method of claim 1 , wherein the second array of bit cells includes pull up transistors formed of single fin finFET transistors and pull down transistors formed of multiple fin finFET transistors.

7. The method of claim 1 , further comprising using the first array of bit cells for an application requiring high cell density and using the second array of bit cells for an application requiring high data access speed.

8. The method of claim 1 , further comprising applying to a control circuit a high voltage level and a low voltage level and applying to the first array of bit cells a selected one of the high voltage level and the low voltage level in response to an enable control signal.

9. The method of claim 1 , further comprising forming the first array of bit cells and the second array of bit cells on the substrate, and forming a processor circuit on the substrate.

10. A method comprising:
applying a first voltage level to a first array of bit cells, the bit cells of the first array including only single fin finFET transistors formed on a substrate, and to a second array of bit cells, the bit cells of the second array including single fin finFET transistors and multiple fin finFET transistors formed on the substrate;
applying a word line voltage to a word line associated with the first array of bit cells; and
varying the first voltage level applied to the first array of bit cells during an operation to write data to the first array of bit cells;
wherein each bit cell of the first array of bit cells includes:
a cross coupled inverter pair comprising a first inverter and a second inverter, each of the first inverter and the second inverter comprising a single fin finFET pull up transistor and a single fin finFET pull down transistor;
a first pass gate coupled between a bit line and an output of the first inverter, the first pass gate comprising a single fin finFET transistor; and
a second pass gate coupled between a complementary bit line and an output of the second inverter, the second pass gate comprising a single fin finFET transistor;

applying the word line voltage to the first pass gate and the second pass gate;
applying the voltage level to terminals of the pull up transistors of the first inverter and the second inverter; and
lowering the first voltage level relative to the word line voltage during a selected operation of the first array of bit cells.

11. The method of claim 10 , wherein the selected operation comprises an operation to read data from the first array of bit cells, and wherein the varying the first voltage level comprises varying the first voltage level to be greater than or equal to the word line voltage.

12. The method of claim 10 , wherein the selected operation comprises an operation to write data to the first array of bit cells, and wherein the varying the first voltage level comprises varying the first voltage level to be lower than the word line voltage.

13. The method of claim 10 , wherein the selected operation comprises placing the first array of bit cells in a standby mode, and wherein the varying the first voltage level comprises varying the first voltage level to be in a range from about 200 millivolts to about 600 millivolts.

14. The method of claim 10 , further comprising:
coupling a voltage control circuit to the first array of bit cells, the voltage control circuit being configured to perform the applying the first voltage level and the varying the first voltage level.

15. The method of claim 14 , further comprising:
coupling the voltage control circuit to a first voltage line having a first voltage substantially equal to the word line voltage; and
coupling the voltage control circuit to a second voltage line having a second voltage less than the first voltage, wherein the applying the first voltage level comprises providing the first voltage to the terminals of the pull up transistors of the first inverter and the second inverter, and wherein the varying the first voltage level comprises providing either the first voltage or the second voltage to the terminals of the pull up transistors of the first inverter and the second inverter in response to an enable control signal.

16. A method, comprising:
applying a first voltage level to a first array of bit cells, the bit cells of the first array including only single fin finFET transistors formed on a substrate, and to a second array of bit cells, the bit cells of the second array including single fin finFET transistors and multiple fin finFET transistors formed on the substrate;
applying a word line voltage to a word line associated with the first array of bit cells; and
varying the first voltage level applied to the first array of bit cells during an operation to write data to the first array of bit cells;
wherein each bit cell of the first array of bit cells includes:
a cross coupled inverter pair comprising a first inverter and a second inverter, each of the first inverter and the second inverter comprising a single fin finFET pull up transistor and a single fin finFET pull down transistor;
a first pass gate coupled between a bit line and an output of the first inverter, the first pass gate comprising a single fin finFET transistor; and

a second pass gate coupled between a complementary bit line and an output of the second inverter, the second pass gate comprising a single fin finFET transistor;
wherein each bit cell of the second array of bit cells includes:
a cross coupled inverter pair comprising a first inverter and a second inverter, each of the first inverter and the second inverter comprising a single fin finFET pull up transistor and a multiple fin finFET pull down transistor;
a first pass gate coupled between a bit line and an output of the first inverter, the first pass gate comprising a multiple fin finFET transistor; and
a second pass gate coupled between a complementary bit line and an output of the second inverter, the second pass gate comprising a multiple fin finFET transistor;

applying the word line voltage to the first pass gate and the second pass gate; and
applying a first voltage level to terminals of the pull up transistors of the first inverter and th

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Liaw Jhon-Jhy

Classifications

• H10D30/024

  of fin field-effect transistors [FinFET] · CPC title

• H10D30/62

  Fin field-effect transistors [FinFET] · CPC title

• G11C11/412 Primary

  using field-effect transistors only · CPC title

• H01L27/1211

  Electricity · mapped topic

• H01L27/0207

  Electricity · mapped topic