Plasma etching apparatus

Patent metadata

Field	Value
Publication number	US-9653357-B2
Application number	US-201414325876-A
Country	US
Kind code	B2
Filing date	Jul 8, 2014
Priority date	Jul 16, 2013
Publication date	May 16, 2017
Grant date	May 16, 2017

Abstract

A plasma etching apparatus includes: a housing defining a plasma processing chamber; a workpiece retaining unit disposed within the plasma processing chamber of the housing and retaining a workpiece on an upper surface of the workpiece retaining unit; a processing gas injecting unit injecting a processing gas for plasma generation onto the workpiece retained by the workpiece retaining unit, the processing gas injecting unit including a processing gas jetting portion; a processing gas supply unit supplying the processing gas to the processing gas injecting unit; and a pressure reducing unit reducing a pressure within the plasma processing chamber. The processing gas jetting portion of the processing gas injecting unit includes a central injecting portion and a peripheral injecting portion surrounding the central injecting portion.

First claim

What is claimed is:

1. A plasma etching apparatus comprising:
a housing defining a plasma processing chamber;
workpiece retaining means for retaining a workpiece on an upper surface of the workpiece retaining means, the workpiece retaining means being disposed within the plasma processing chamber;
processing gas injecting means for injecting a processing gas for plasma generation onto the workpiece retained by the workpiece retaining means, the processing gas injecting means having a processing gas jetting portion including a central injecting portion and a peripheral injecting portion surrounding the central injecting portion;
processing gas supply means for supplying the processing gas to the processing gas injecting means, the processing gas supply means including a processing gas supply source, a buffer tank communicating with the processing gas supply source and temporarily containing the processing gas, a central injecting portion supply path making the buffer tank and the central injecting portion communicate with each other, a peripheral injecting portion supply path making the buffer tank and the peripheral injecting portion communicate with each other, a first high-frequency opening and closing valve disposed in the central injecting portion supply path, a second high-frequency opening and closing valve disposed in the peripheral injecting portion supply path, and control means for controlling an opening and closing frequency of the first high-frequency opening and closing valve at a first frequency and an opening and closing frequency of the second high-frequency opening and closing valve at a second frequency, and wherein the first frequency is different from the second frequency; and
pressure reducing means for reducing a pressure within the plasma processing chamber.

2. The plasma etching apparatus according to claim 1 ,
wherein the processing gas supply means includes a first processing gas supply source supplying a first processing gas, a second processing gas supply source supplying a second processing gas, gas mixing means for mixing the first processing gas and the second processing gas with each other, a processing gas communicating path making the gas mixing means and the buffer tank communicate with each other, and pressure adjusting means for adjusting a pressure of the processing gas to be supplied to the buffer tank, the pressure adjusting means being disposed in the processing gas communicating path.

3. The plasma etching apparatus according to claim 1 ,
wherein a plurality of processing gas supply means are provided, and
the control means controls the opening and closing frequency of the first high-frequency opening and closing valve and the opening and closing frequency of the second high-frequency opening and closing valve, the first high-frequency opening and closing valve and the second high-frequency opening and closing valve being disposed respectively in the central injecting portion supply path and the peripheral injecting portion supply path of each processing gas supply means.

4. A plasma etching apparatus comprising:
a housing defining a plasma processing chamber;
workpiece retaining means for retaining a workpiece on an upper surface of the workpiece retaining means, the workpiece retaining means being disposed within the plasma processing chamber;
processing gas injecting means for injecting a processing gas for plasma generation onto the workpiece retained by the workpiece retaining means, the processing gas injecting means having a processing gas jetting portion including a central injecting portion and a peripheral injecting portion surrounding the central injecting portion;
processing gas supply means for supplying the processing gas to the processing gas injecting means, the processing gas supply means including a processing gas supply source, a buffer tank communicating with the processing gas supply source and temporarily containing the processing gas, a central injecting portion supply path making the buffer tank and the central injecting portion communicate with each other, a peripheral injecting portion supply path making the buffer tank and the peripheral injecting portion communicate with each other, a first high-frequency opening and closing valve disposed in the central injecting portion supply path, a second high-frequency opening and closing valve disposed in the peripheral injecting portion supply path, and control means for controlling an opening and closing frequency of the first high-frequency opening and closing valve and an opening and closing frequency of the second high-frequency opening and closing valve; and
pressure reducing means for reducing a pressure within the plasma processing chamber, and
further wherein said processing gas supply means comprises a first processing gas supply means and a second processing gas supply means, and
wherein the control means controls:
the opening and closing frequency of the first high-frequency opening and closing valve and the opening and closing frequency of the second high-frequency opening and closing valve of the first processing gas supply means, and
the opening and closing frequency of the first high-frequency opening and closing valve and the opening and closing frequency of second high-frequency opening and closing valve of the second processing gas supply means, and

wherein the control means alternatively controls the first processing gas supply means and the second processing gas supply means such that gas from the buffer tank associated with the first processing gas supply means and gas from the buffer tank associated with the second gas supply means are alternatively provided to the plasma processing chamber.

5. The plasma etching apparatus according to claim 4 ,
wherein each of the first and second processing gas supply means includes a first processing gas supply source supplying a first processing gas, a second processing gas supply source supplying a second processing gas, gas mixing means for mixing the first processing gas and the second processing gas with each other, a processing gas communicating path making the gas mixing means and the buffer tank communicate with each other, and pressure adjusting means for adjusting a pressure of the processing gas to be supplied to the buffer tank, the pressure adjusting means being disposed in the processing gas communicating path.

6. The plasma etching apparatus according to claim 4 , wherein the control means controls:
the opening and closing frequency of the first high-frequency opening and closing valve of the first processing gas supply means at a first frequency; and
the opening and closing frequency of the second high-frequency opening and closing valve of the first processing gas supply means at a second frequency, and
wherein the first frequency is different from the second frequency.

7. The plasma etching apparatus according to claim 4 , wherein the control means controls:
the opening and closing frequency of the first high-frequency opening and closing valve of the first processing gas supply means at a first frequency;
the opening and closing frequency of the second high-frequency opening and closing valve of the first processing gas supply means at a second frequency;

the opening and closing frequency of the first high-frequency opening and closing valve of the second processing gas supply means at a third frequency; and
the opening and closing frequency of the second high-frequency opening and closing valve of the second processing gas supply means at a fourth frequency.

8. The plasma etching apparatus according to claim 4 , wherein at least two of the following frequencies differ from each other: the first frequency, the second frequency, the third freque

Assignees

• Disco Corp

Inventors

• Arami Junichi
• Okazaki Kenji

Classifications

• H10P72/0421 Primary

  for drying etching · CPC title

• H10P50/242

  of Group IV materials · CPC title

• H01J37/3244 Primary

  Gas supply means · CPC title

• H01J2237/334

  Etching · CPC title

• H01L21/67069

  Electricity · mapped topic