Plasma etching apparatus
US-9653357-B2 · May 16, 2017 · US
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Patent family 52319556
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52319556 |
| Family type | — |
| Earliest priority | Jul 16, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9653357B2 — Plasma etching apparatus |
Representative publication
Best representative member for this family based on priority and filing country.
US9653357B2 — Plasma etching apparatus (published May 16, 2017)
Member publications
Related publications in this family.
Plasma etching apparatus
US-2015020973-A1 · Jan 22, 2015 · US