Plasma etching apparatus
US-9653357-B2 · May 16, 2017 · US
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Arami Junichi patents
Arami Junichi is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Arami Junichi |
| Total patents | 3 |
| First publication | Jan 22, 2015 |
| Latest publication | May 16, 2017 |
Notable patents
Publications ranked by popularity score, then publication date.
Wafer processing method
US-9379015-B2 · Jun 28, 2016 · US
Plasma etching apparatus
US-2015020973-A1 · Jan 22, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Disco Corp | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0421 | 2 |
| H10P50/242 | 2 |
| H01J37/3244 | 2 |
| H10D84/01 | 2 |
| H01L21/67069 | 2 |