Method and apparatus of operating a scanning probe microscope

Patent metadata

Field	Value
Publication number	US-9588136-B2
Application number	US-201615137937-A
Country	US
Kind code	B2
Filing date	Apr 25, 2016
Priority date	Nov 13, 2008
Publication date	Mar 7, 2017
Grant date	Mar 7, 2017

Abstract

An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.

First claim

The invention claimed is:

1. A scanning probe microscope (SPM) comprising:
an actuator to generate relative motion between a probe and a sample,
a detector to detect motion of the probe;
a digital controller including FPGA architecture to determine, from the detected probe motion, a probe deflection based on a probe-sample interaction, the probe deflection being substantially independent of parasitic probe deflection, wherein the parasitic probe deflection corresponds to any relative periodic motion between the probe and the sample when the probe is not interacting with the sample; and
wherein the controller controls the SPM in real time using the probe deflection; and
wherein an amplitude of a probe-sample interaction is less than an amplitude of the parasitic probe deflection.

2. The SPM of claim 1 , wherein the controller identifies an instantaneous force associated with the interaction.

3. The SPM of claim 2 , wherein the actuator provides relative oscillatory motion between the probe and the sample, and wherein the instantaneous force is identified prior to the completion of one cycle of the oscillatory motion.

4. The SPM of claim 3 , wherein the instantaneous force is used to maintain a setpoint during imaging.

5. The SPM of claim 4 , wherein the instantaneous force is a repulsive force.

6. The SPM of claim 4 , wherein a minimum controllable force corresponding to the instantaneous force is less than about 1000 μN.

7. The SPM of claim 6 , wherein the minimum controllable force is less than about 10 pN.

8. The SPM of claim 6 , wherein the detected probe motion is synchronously averaged to reduce the minimum controllable force.

9. The SPM of claim 1 , wherein the parasitic probe deflection corresponds to any relative periodic motion between the probe and the sample when the probe is not interacting with the sample.

10. The SPM of claim 9 , wherein the relative periodic motion between the probe and the sample when the probe is not interacting with the sample is caused by the hydrodynamic background associated with operation of the SPM.

11. The SPM of claim 1 , wherein the controller acquires an image with a resolution of less than 100 nm

12. The SPM of claim 1 , wherein the controller acquires an image with a maximum tracking force of less than 10 pN.

13. The SPM of claim 1 , wherein the probe has a spring constant between about 0.1 N/m and 1000 N/m.

14. The SPM of claim 1 , wherein the actuator is controlled by a feedback loop using a pre-determined synchronous distance in each interaction period.

15. The SPM of claim 10 , wherein the controller performs at least one of lock-in amplification and synchronous averaging to subtract the hydrodynamic background.

Assignees

• Bruker Nano Inc

Inventors

• Hu Yan
• Hu Shuiqing
• Su Chanmin

Classifications

• G01Q60/00

  Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof · CPC title

• B82Y35/00

  Methods or apparatus for measurement or analysis of nanostructures · CPC title

• G01Q60/24 Primary

  AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes · CPC title

• G01Q60/34

  Tapping mode · CPC title

• G01Q10/065 Primary

  Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself · CPC title