MOSFET with ultra low drain leakage

Patent metadata

Field	Value
Publication number	US-9536945-B1
Application number	US-201514814142-A
Country	US
Kind code	B1
Filing date	Jul 30, 2015
Priority date	Jul 30, 2015
Publication date	Jan 3, 2017
Grant date	Jan 3, 2017

Abstract

A semiconductor device includes a monocrystalline substrate configured to form a channel region between two recesses in the substrate. A gate conductor is formed on a passivation layer over the channel region. Dielectric pads are formed in a bottom of the recesses and configured to prevent leakage to the substrate. Source and drain regions are formed in the recesses on the dielectric pads from a deposited non-crystalline n-type material with the source and drain regions making contact with the channel region.

First claim

The invention claimed is:

1. A semiconductor device, comprising:
a monocrystalline substrate configured to form a channel region between two recesses in the substrate;
a gate conductor formed on a passivation layer over the channel region;
dielectric pads formed in a bottom of the recesses and configured to prevent leakage to the substrate; and
source and drain regions formed in the recesses on the dielectric pads from a deposited non-crystalline n-type material with the source and drain regions making contact with the channel region.

2. The semiconductor device as recited in claim 1 , wherein the n-type material includes ZnO.

3. The semiconductor device as recited in claim 2 , wherein the ZnO is Al-doped.

4. The semiconductor device as recited in claim 1 , wherein the source and drain regions extend over vertical sides of the dielectric pads.

5. The semiconductor device as recited in claim 1 , wherein the source and drain regions extend above a surface of the substrate.

6. The semiconductor device as recited in claim 1 , wherein the n-type material includes an amorphous phase.

7. The semiconductor device as recited in claim 1 , wherein the substrate includes a III-V materials and the source and drain regions include a II-VI material.

8. The semiconductor device as recited in claim 1 , wherein the source and drain regions extend below the passivation layer on sides of the recesses.

9. A semiconductor device, comprising:
a III-V monocrystalline substrate having a passivation layer formed thereon, the substrate being configured to form a channel region between two recesses in the substrate, the recesses forming undercut regions in the substrate below the passivation layer;
a gate conductor formed on the passivation layer over the channel region;
dielectric pads formed in a bottom of the recesses between the undercut regions, the undercut regions being free from dielectric material of the dielectric pads, the dielectric pads being configured to prevent leakage to the substrate; and
source and drain regions formed from ZnO deposited in the recesses over the dielectric pads, the source and drain regions making contact with the channel region.

10. The semiconductor device as recited in claim 9 , wherein the ZnO is Al-doped.

11. The semiconductor device as recited in claim 9 , wherein the source and drain regions extend over vertical sides of the dielectric pads.

12. The semiconductor device as recited in claim 9 , wherein the source and drain regions extend above a surface of the substrate.

13. The semiconductor device as recited in claim 9 , wherein the ZnO includes an amorphous phase.

14. The semiconductor device as recited in claim 9 , wherein the source and drain regions extend below the passivation layer in the undercut regions.

Assignees

• IBM

Inventors

• De Souza Joel P
• Fogel Keith E
• Kim Jeehwan
• Sadana Devendra K

Classifications

• H10P14/3442

  N-type · CPC title

• H10D64/01324

  characterised by the sectional shape, e.g. T or inverted-T · CPC title

• H10P14/3434

  being oxide semiconductor materials (Group IIB-VIA semiconductor materials H10P14/3424) · CPC title

• H10P14/3426

  Oxides · CPC title

• H10D64/01358

  the insulator being formed after the semiconductor body, the semiconductor being a Group III-V material · CPC title