Chemical Mechanical Polishing (CMP) of Cobalt-Containing substrate
US-2017362466-A1 · Dec 21, 2017 · US
US9489978B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9489978-B2 |
| Application number | US-201214119644-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 1, 2012 |
| Priority date | Jun 6, 2011 |
| Publication date | Nov 8, 2016 |
| Grant date | Nov 8, 2016 |
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Official abstract text for this publication.
Provided is a method for surface-treating a metal component, whereby a pseudo-plated layer can be formed on a surface of a metal component, and quality equivalent to plating or other coating process can be obtained. The method includes a chemical polishing step scraping a surface of a base plate formed into a given shape through chemical polishing by 0.5 micrometer or more, and a heat treat pseudo-plating step forming a pseudo-plated layer on the surface through a heat treatment conducted by heating the base plate at a solution treatment temperature or above, for example, 850 degrees C. or above, preferably approximate 1040 degrees C., in a reducing atmosphere after the polishing step.
Opening claim text (preview).
The invention claimed is: 1. A method of surface-treating a Fe—Cr—Ni stainless steel component, comprising: a polishing step polishing a surface of the Fe—Cr—Ni stainless steel component formed into a given shape by chemical polishing; and a heat treat pseudo-plating step forming a pseudo-plated layer on the surface through a heat treatment conducted by heating the Fe—Cr—Ni stainless steel component having the surface being in a chemically-polished state at a solution treatment temperature or above in a reducing atmosphere after the polishing step. 2. The method of claim 1 , wherein the polishing step scrapes the surface of the Fe—Cr—Ni stainless steel component by 0.5 micrometer or more. 3. The method of claim 1 , wherein the heat treat pseudo-plating step forms the pseudo-plated layer through a solution treatment conducted by heating at 850 degrees C. or above in the reducing atmosphere. 4. The method of claim 1 , further comprising: a preprocessing step preprocessing the Fe—Cr—Ni stainless steel component by barrel polishing before the polishing step. 5. The method of claim 1 , wherein the Fe—Cr—Ni stainless steel component is a component of a disk drive. 6. The method of claim 2 , wherein the heat treat pseudo-plating step forms the pseudo-plated layer through a solution treatment conducted by heating at 850 degrees C. or above in the reducing atmosphere. 7. The method of claim 2 , further comprising: a preprocessing step preprocessing the Fe—Cr—Ni stainless steel component by barrel polishing before the polishing step. 8. The method of claim 3 , further comprising: a preprocessing step preprocessing the Fe—Cr—Ni stainless steel component by barrel polishing before the polishing step. 9. The method of claim 6 , further comprising: a preprocessing step preprocessing the Fe—Cr—Ni stainless steel component by barrel polishing before the polishing step. 10. The method of claim 2 , wherein the Fe—Cr—Ni stainless steel component is a component of a disk drive. 11. The method of claim 3 , wherein the Fe—Cr—Ni stainless steel component is a component of a disk drive. 12. The method of claim 4 , wherein the Fe—Cr—Ni stainless steel component is a component of a disk drive. 13. The method of claim 6 , wherein the Fe—Cr—Ni stainless steel component is a component of a disk drive. 14. The method of claim 7 , wherein the Fe—Cr—Ni stainless steel component is a component of a disk drive. 15. The method of claim 8 , wherein the Fe—Cr—Ni stainless steel component is a component of a disk drive. 16. The method of claim 9 , wherein the Fe—Cr—Ni stainless steel component is a component of a disk drive. 17. A method of surface-treating a Fe—Cr—Ni stainless steel component, comprising: a preprocessing step preprocessing a surface of the Fe—Cr—Ni stainless steel component formed into a given shape by barrel polishing; a polishing step, after the preprocessing step, polishing the surface of the Fe—Cr—Ni stainless steel component by chemical polishing, to remove fine irregularities that are left on the surface and are hard to be removed by the barrel polishing; and a heat treat pseudo-plating step forming a pseudo-plated layer on the surface through a heat treatment conducted by heating the Fe—Cr—Ni stainless steel component at a solution treatment temperature or above in a reducing atmosphere after the polishing step.
Heavy metals · CPC title
Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus {; Intermediate mediums; Apparatus or processes specially adapted for their manufacture (processes involving a single technical art and for which provision exists elsewhere, see the relevant class, e.g. B29, B41M, B05D, C08L, F16N)} · CPC title
Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material · CPC title
for particular articles not mentioned below · CPC title
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