Electrodeposition system and method incorporating an anode having a back side capacitive element

Patent metadata

Field	Value
Publication number	US-9481940-B2
Application number	US-201414315390-A
Country	US
Kind code	B2
Filing date	Jun 26, 2014
Priority date	Jun 26, 2014
Publication date	Nov 1, 2016
Grant date	Nov 1, 2016

Abstract

Disclosed are an electrodeposition system and method with an anode assembly comprising a capacitor comprising a first conductive plate (i.e., an anode) with a frontside having a surface exposed to a plating solution, a second conductive plate on a backside of the first conductive plate, and a dielectric layer between the two conductive plates. During a non-plating mode, a power source, having positive and negative terminals connected to the first and second conductive plates, respectively, is turned on, thereby polarizing the first conductive plate (i.e., the anode) relative to the second conductive plate to prevent degradation of the anode and/or plating solution. During an active plating mode, another power source, having positive and negative terminals connected to the first conductive plate (i.e., the anode) and a cathode, respectively, is turned on, thereby polarizing the anode relative to the cathode in order to deposit a plated layer on a workpiece.

First claim

What is claimed is:

1. An electrodeposition system comprising:
a container;
an anode assembly in said container and comprising a capacitor comprising:
a first conductive plate;
a second conductive plate parallel to said first conductive plate; and
a dielectric layer between said first conductive plate and said second conductive plate; and,

a first power source comprising:
a first positive terminal electrically connected to said first conductive plate; and
a first negative terminal electrically connected to said second conductive plate,

said first power source supplying a first operating current to said capacitor during a non-plating mode when a surface of said first conductive plate is exposed to a plating solution contained in said container, said first operating current preventing degradation of any one of said first conductive plate and said plating solution,
said anode assembly further comprising a holder holding said capacitor in said plating solution, said holder comprising:
an opening exposing said surface of said first conductive plate to said plating solution; and
a seal around said opening so as to prevent exposure of said dielectric layer and said second conductive plate to said plating solution.

2. The electrodeposition system of claim 1 , further comprising:
a cathode assembly removably placed in said container; and
a second power source comprising:
a second positive terminal electrically connected to said first conductive plate; and,
a second negative terminal electrically connected to said cathode assembly so as to form an electric circuit,

said second power source supplying a second operating current to said electric circuit during an active plating mode so as to form a plated layer on a workpiece exposed to said plating solution at said cathode assembly.

3. The electrodeposition system of claim 2 , said first operating current being less than said second operating current.

4. The electrodeposition system of claim 2 , further comprising a controller operably connected to said first power source and said second power source,
said controller selectively causing said first power source to turn on and said second power source to turn off in order to operate said electrodeposition system in said non-plating mode, and
said controller further selectively causing said second power source to turn on and said first power source to turn off in order to operate said electrodeposition system in said active plating mode.

5. The electrodeposition system of claim 1 , said first conductive plate comprising any one of a soluble metal plate and an insoluble metal plate.

6. The electrodeposition system of claim 2 ,
said first conductive plate comprising an insoluble metal plate comprising a platinum catalyst-coated titanium plate,
said plating solution comprising water and, dissolved in said water, methyl sulfonic acid (MSA), tin ions and silver ions,
said plating solution corroding platinum and exposing titanium of said platinum catalyst-coated titanium plate,
said first operating current preventing said titanium from said platinum catalyst-coated titanium plate from dissolving in said plating solution and further preventing tin from said plating solution from depositing on said surface, and
said second operating current causing a tin-silver plated layer to form on said workpiece.

7. An electrodeposition system comprising:
a container;
an anode assembly in said container and comprising a capacitor comprising:
a first conductive plate, said first conductive plate comprising a soluble metal plate comprising a tin plate;
a second conductive plate; and,
a dielectric layer between said first conductive plate and said second conductive plate; and,

a first power source comprising:
a first positive terminal electrically connected to said first conductive plate; and,
a first negative terminal electrically connected to said second conductive plate, said first power source supplying a first operating current to said capacitor during a non-plating mode when a surface of said first conductive plate is exposed to a plating solution contained in said container, said plating solution comprising water and, dissolved in said water, methyl sulfonic acid (MSA), tin ions and silver ions and said first operating current preventing deposition of silver on said surface,

said anode assembly further comprising a holder holding said capacitor in said plating solution, said holder comprising:
an opening exposing said surface of said first conductive plate to said plating solution; and
a seal around said opening so as to prevent exposure of said dielectric layer and said second conductive plate to said plating solution.

8. The electrodeposition system of claim 7 , further comprising:
a cathode assembly removably placed in said container; and,
a second power source comprising:
a second positive terminal electrically connected to said first conductive plate; and
a second negative terminal electrically connected to said cathode assembly so as to form an electric circuit,

said second power source supplying a second operating current to said electric circuit during an active plating mode so as to form a tin-silver plated layer on a workpiece exposed to said plating solution at said cathode assembly.

9. The electrodeposition system of claim 8 , said first operating current being less than said second operating current.

10. The electrodeposition system of claim 8 , further comprising a controller operably connected to said first power source and said second power source,
said controller selectively causing said first power source to turn on and said second power source to turn off in order to operate said electrodeposition system in said non-plating mode, and
said controller further selectively causing said second power source to turn on and said first power source to turn off in order to operate said electrodeposition system in said active plating mode.

11. The electrodeposition system of claim 7 , said first operating current causing tin from said tin plate to dissolve in said plating solution.

12. A system comprising:
a container comprising a plating solution;
an anode assembly in said container, said anode assembly comprising:
a capacitor, comprising:
a first conductive plate;
a second conductive plate; and
a dielectric layer between said first conductive plate and said second conductive plate, and,

a holder holding said capacitor in said plating solution, said holder having an opening exposing a surface of said first conductive plate to said plating solution and a seal around said opening preventing exposure of said dielectric layer and said second conductive plate to said plating solution; and

a first power source comprising:
a first terminal electrically connected from said first power source to said first conductive plate; and
a second terminal electrically connected from said first power source to said second conductive plate,

said first power source supplying a first operating current to said capacitor during a non-plating mode when said surface is exposed to said plating solution.

13. The system of claim 12 , further comprising:
a cathode assembly removably placed in said container; and
a second power source comprising:
a third terminal electrically connected from said second power source to said first conductive plate; and,
a fourth terminal electrically connected from said second power source to said cathode assembly,

said second power source supplying a second operating current to an electric circuit formed by said cathode assembly and said anode assembly during an active plating mod

Assignees

• IBM
• Ancosys Gmbh

Inventors

• Arvin Charles L
• Stahl Jürg

Classifications

• C25D21/12

  Process control or regulation (controlling or regulating in general G05) · CPC title

• C25D21/00 Primary

  Processes for servicing or operating cells for electrolytic coating · CPC title

• C23F13/005

  Anodic protection · CPC title

• C25D17/10

  Electrodes {, e.g. composition, counter electrode} · CPC title

• C25D3/60

  containing more than 50% by weight of tin · CPC title