Reaction products of heterocyclic nitrogen compounds polyepoxides and polyhalogens

Patent metadata

Field	Value
Publication number	US-9439294-B2
Application number	US-201414254792-A
Country	US
Kind code	B2
Filing date	Apr 16, 2014
Priority date	Apr 16, 2014
Publication date	Sep 6, 2016
Grant date	Sep 6, 2016

Abstract

Reaction products of heterocyclic nitrogen compounds, polyepoxide compounds and polyhalogen compounds may be used as levelers in metal electroplating baths, such as copper electroplating baths, to provide good throwing power. Such reaction products may plate metal with good surface properties and good physical reliability.

First claim

What is claimed is:

1. A method comprising:
a) providing a substrate;
b) providing a composition comprising one or more sources of metal ions, an electrolyte and one or more compounds comprising a reaction product of one or more heterocyclic nitrogen compounds comprising at least two reactive nitrogen atoms with the proviso that at least one of the reactive nitrogen atoms is in the ring of the one or more heterocyclic nitrogen compounds; one or more polyepoxide compounds and one or more polyhalogen compounds;
c) contacting the substrate with the composition;
d) applying a current to the substrate and the composition; and
e) depositing a metal on the substrate.

2. The method of claim 1 , wherein the one or more sources or metal ions are chosen from copper salts and tin salts.

3. The method of claim 1 wherein the substrate comprises a plurality of one or more of through-holes, trenches and vias.

Assignees

• Rohm & Haas Elect Mat

Inventors

• Kozhukh Julia
• Niazimbetova Zuhra I

Classifications

• H05K3/421

  Blind plated via connections (H05K3/422, H05K3/423 and H05K3/425 take precedence) · CPC title

• H05K3/18

  using precipitation techniques to apply the conductive material · CPC title

• C25D3/58

  containing more than 50% by weight of copper · CPC title

• C08G59/5046

  heterocyclic · CPC title

• C25D3/32 Primary

  characterised by the organic bath constituents used · CPC title