Reaction products of guanidine compounds or salts thereof, polyepoxides and polyhalogens

Patent metadata

Field	Value
Publication number	US-9403762-B2
Application number	US-201314086951-A
Country	US
Kind code	B2
Filing date	Nov 21, 2013
Priority date	Nov 21, 2013
Publication date	Aug 2, 2016
Grant date	Aug 2, 2016

Abstract

Reaction products of guanidine compounds or salts thereof, polyepoxide compounds and polyhalogen compounds may be used as levelers in metal electroplating baths, such as copper electroplating baths, to provide good throwing power. Such reaction products may plate with good surface properties of the metal deposits and good physical reliability.

First claim

What is claimed is:

1. A compound comprising a reaction product of one or more guanidine compounds or salts thereof, one or more polyepoxide compounds and one or more polyhalogen compounds, wherein the one or more polyhalogen compounds have a formula:
X 1 —R 16 —X 2   (VII)

wherein X 1 and X 2 may be the same or different and are halogens chosen from chlorine bromine fluorine and iodine; R 16 is a moiety having formula:
—CH 2 —R 17 —CH 2 —  (VIII)

wherein R 17 is a linear or branched, substituted or unsubstituted (C 1 -C 18 )alkyl, substituted or unsubstituted (C 6 -C 12 )cycloalkyl, substituted or unsubstituted (C 6 -C 15 )aryl, —CH 2 —O—(R 18 —O) q —CH 2 — where R 18 is a substituted or unsubstituted, linear or branched (C 2 -C 10 )alkyl and q is an integer of 1-10.

2. The compound of claim 1 , wherein the one or more guanidine compounds have a formula:

wherein R 1 , R 2 , R 3 and R 4 are the same or different and comprise hydrogen; linear or branched, substituted or unsubstituted (C 1 -C 10 )alkyl; linear or branched carboxy(C 1 -C 10 )alkyl; linear or branched, substituted or unsubstituted amino(C 1 -C 10 )alkyl; substituted or unsubstituted aryl; linear or branched, substituted or unsubstituted aryl(C 1 -C 10 )alkyl; substituted or unsubstituted sulfonyl; —N(R 5 ) 2 where R 5 may be the same or different and are hydrogen or linear or branched, substituted or unsubstituted (C 1 -C 10 )alkyl; or a moiety having formula:

wherein R 6 and R 7 are the same or different and comprise hydrogen, linear or branched, substituted or unsubstituted (C 1 -C 10 )alkyl; linear or branched carboxy(C 1 -C 10 )alkyl; substituted or unsubstituted aryl; substituted or unsubstituted, linear or branched aryl(C 1 -C 10 )alkyl; —N(R 5 ) 2 where R 5 is defined as above; or a moiety having formula:

wherein R 6 and R 7 are as defined above.

3. The compound of claim 1 , wherein salts of the one or more guanidine compounds have a formula:

wherein R 1 , R 2 , R 3 and R 4 are as defined in claim 1 and Y − comprises halide, sulfate, hydrogen sulfate, carbonate, bicarbonate, nitrate, nitrite, borate, perchlorate, phosphite or phosphate.

4. The compound of claim 1 , wherein the one or more polyepoxides have a formula:

wherein R 8 and R 9 are the same or different and are chosen from hydrogen and (C 1 -C 4 )alkyl; A=OR 10 or R 11 ; R 10 =((CR 12 R 13 ) m O), (aryl-O) p , CR 12 R 13 —Z—CR 12 CR 13 , or OZ′ t O; R 11 =(CH 2 ) y ; B is (C 5 -C 12 )cycloalkyl; Z=a 5- or 6-membered ring; Z′ is R 14 OArOR 14 , (R 15 O) a Ar(OR 15 ), or (R 15 O) a , Cy(OR 15 ), Cy=(C 5 -C 12 )cycloalkyl; each R 12 and R 13 are the same or different and are chosen from hydrogen, methyl, or hydroxyl; R 14 is (C 1 -C 8 )alkyl; R 15 is (C 2 -C 6 )alkyleneoxy; a=1-10; m=1-6; p=1-6; t=1-4; and y=0-6.

5. The compound of claim 1 , wherein a molar ratio of a moiety of the one or more guanidine compounds or salts thereof to a moiety of the one or more polyepoxide compounds to a moiety of the one or more polyhalogen compounds is from 0.5-1:0.5-1:0.05-0.5 based on monomer molar ratios.

6. The compound of claim 1 , wherein the one or more polyepoxide compounds are chosen from 1,4-butanediol diglycidyl ether, ethylene glycol diglycidyl ether, diethylene glycol diglycidyl ether, triethylene glycol diglycidyl ether, glycerol diglycidyl ether, neopentyl glycol diglycidyl ether, propylene glycol diglycidyl ether, dipropylene glycol diglycidyl ether and poly(propyleneglycol) diglycidyl ether.

7. The compound of claim 1 , wherein the one or more polyhalogen compounds are chosen from 1,2-dibromoethane; 1,2-dichloroethane; 1,2-diiodoethane; 1,3-dibromopropane; 1,3-dichloropropane; 1,3-diiodopropane; 1,4-dibromobutane; 1,4-dichlorobutane; 1,4-diiodobutane; 1,5-dibromopentane; 1,5-dichloropentane; 1,5-diiodopentane; 1,6-dibromohexane; 1,6-dichlorohexane; 1,6-diiodohexane; 1,7-dibromoheptane; 1,7-dichloroheptane; 1,7-diiodoheptane; 1,8-dibromooctane; 1,8-dichlorooctane; 1,8-diiodooctane; 1,3-dichloro-2-propanol; 1,4-dichloro-2,3-butanediol; 1-bromo-3-chloroethane; 1-chloro-3-iodoethane; 1,2,3-trichloropropane; 1-bromo-3-chloropropane; 1-chloro-3-iodopropane; 1,4-dichloro-2-butanol; 2,3-dichloro-1-propanol; 1,4-dichlorocyclohexane; 1-bromo-3-chloro-2-methylpropane; 1,5-dichloro[3-(2-chloroethyl)]pentane; 1,10-dichlorodecane; 1,18-dichlorooctadecane; 2,2′-dichloroethyl ether; 1,2-bis(2-chloroethoxy)ethane; diethylene glycol bis(2-chloroethyl)ether; triethylene glycol bis(2-chloroethyl)ether; 2,2′-dichloropropyl ether; 2,2′-dichlorobutyl ether; tetraethylene glycol bis(2-bromoethyl) ether and heptaethylene glycol bis(2-chloroethyl) ether.

Assignees

• Rohm & Haas Elect Mat

Inventors

• Kozhukh Julia
• Niazimbetova Zuhra I
• Rzeznik Maria Anna

Classifications

• C25D3/32

  characterised by the organic bath constituents used · CPC title

• C25D3/02 Primary

  from solutions (C25D5/34 - C25D5/46 take precedence) · CPC title

• H05K2201/09563

  Metal filled via · CPC title

• C25D3/38 Primary

  of copper · CPC title

• H05K3/424

  by direct electroplating · CPC title