Wet oxidation process performed on a dielectric material formed from a flowable CVD process

Patent metadata

Field	Value
Publication number	US-9390914-B2
Application number	US-201213396410-A
Country	US
Kind code	B2
Filing date	Feb 14, 2012
Priority date	Dec 21, 2009
Publication date	Jul 12, 2016
Grant date	Jul 12, 2016

Abstract

Methods of performing a wet oxidation process on a silicon containing dielectric material filling within trenches or vias defined within a substrate are provided. In one embodiment, a method of forming a dielectric material on a substrate includes forming a dielectric material on a substrate by a flowable CVD process, curing the dielectric material disposed on the substrate, performing a wet oxidation process on the dielectric material disposed on the substrate, and forming an oxidized dielectric material on the substrate.

First claim

What is claimed is:

1. A method of forming an oxidized material on a substrate, comprising:
forming a silicon containing layer on a substrate by a flowable CVD process comprising exposing the substrate to trisilylamine and ammonia;
removing moisture from the silicon containing layer disposed on the substrate;
subsequently immersing the silicon containing layer into a processing solution having an oxygen source, wherein the oxygen source in the processing solution at least partially replaces silicon nitrogen or silicon hydrogen bonds in the silicon containing layer with silicon oxygen bonds; and
forming an oxidized silicon containing layer on the substrate.

2. The method of claim 1 , wherein the processing solution includes an oxygen source disposed in deionized (DI) water.

3. The method of claim 2 , wherein the oxygen source is O 3 .

4. The method of claim 1 further comprising:
performing a thermal anneal process on the oxidized silicon containing layer to anneal the substrate to a temperature between about 100 degrees Celsius and about 1000 degrees Celsius.

5. A method of forming an oxidized dielectric material on a substrate, comprising:
forming a silicon containing layer on a substrate by a flowable CVD process, wherein the silicon containing layer is formed by exposure to a gas mixture containing trisilylamine (TSA) and NH 3 ;
curing the silicon containing layer disposed on the substrate;
subsequently wetting the silicon containing layer with a processing solution having O 3 disposed in deionized (DI) water, wherein the ozone disposed in the deionized (DI) water has a concentration between about 1 milligram (mg) per liter (L) and about 1000 milligram (mg) per liter (L); and
forming an oxidized silicon containing layer on the substrate.

6. The method of claim 5 , wherein the oxygen source provided from O 3 in the processing solution at least partially coverts silicon nitrogen or silicon hydrogen bonding formed in the silicon containing layer into silicon oxygen bonding.

7. The method of claim 5 , further comprising:
performing a thermal anneal process on the oxidized silicon containing layer to anneal the substrate to a temperature between about 100 degrees Celsius and about 1000 degrees Celsius.

Assignees

• Wang Linlin
• Mallick Abhijit Basu
• Ingle Nitin K
• Applied Materials Inc

Inventors

• Wang Linlin
• Mallick Abhijit Basu
• Ingle Nitin K

Classifications

• H10P14/6534 Primary

  by exposure to a liquid · CPC title

• H10P14/6522 Primary

  introduced into a nitride material, e.g. changing SiN to SiON · CPC title

• H01L21/02326 Primary

  Electricity · mapped topic

• H01L21/02343

  Electricity · mapped topic

• H10P14/6339

  deposition by cyclic CVD, e.g. ALD, ALE or pulsed CVD · CPC title