Wet oxidation process performed on a dielectric material formed from a flowable CVD process
US-9390914-B2 · Jul 12, 2016 · US
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Mallick Abhijit Basu patents
Mallick Abhijit Basu holds 2 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 2 |
| Recent patents | 0 |
| First publication | Mar 17, 2015 |
| Latest publication | Jul 12, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Oxygen-doping for non-carbon radical-component CVD films
US-8980382-B2 · Mar 17, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H01J37/32449 | 1 |
| H01J37/32357 | 1 |
| H01J37/32082 | 1 |
| C23C16/56 | 1 |
| C23C16/45565 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 2 |
| Chemistry & Metallurgy | 1 |