Heat treatment apparatus and heat treatment method

Patent metadata

Field	Value
Publication number	US-9324591-B2
Application number	US-201213438234-A
Country	US
Kind code	B2
Filing date	Apr 3, 2012
Priority date	Apr 5, 2011
Publication date	Apr 26, 2016
Grant date	Apr 26, 2016

Abstract

A heat treatment apparatus including: a processing container for processing wafers held in a boat; heaters for heating the processing container; and a control section for controlling the heaters. Heater temperature sensors are provided between the heaters and the processing container, in-container temperature sensors are provided in the processing container, and movable temperature sensors are provided in the boat. The temperature sensors are connected to a temperature estimation section. The temperature estimation section selects two of the three types of temperature sensors, e.g. the movable temperature sensors and the in-container temperature sensors, and determines the temperature of a wafer according to the following formula: T=T 1 ×(1−α)+T 2 ×α, α>1, where T 1 and T 2 represent detection temperatures of the selected temperature sensors, and α represents a mixing ratio.

First claim

What is claimed is:

1. A heat treatment apparatus comprising:
a processing container configured to process an object to be processed;
a heating section, provided outside the processing container, configured to externally heat the processing container;
a holding section configured to hold the object to be processed and to be carried into and out of the processing container;
a holding section transport section configured to carry the holding section into and out of the processing container;
a first temperature sensor, provided between the heating section and the processing container, configured to detect the temperature of the heating section;
a second temperature sensor, fixed in the processing container, configured to detect the interior temperature of the processing container;
a third temperature sensor to be carried into and out of the processing container along with the holding section;
a control section for controlling a power to the heating section; and
a temperature estimation section configured to select two of the first temperature sensor, the second temperature sensor and the third temperature sensor, and estimate the temperature of the object to be processed based on detection temperatures from the two temperature sensors,
wherein the temperature estimation section determines the temperature T of the object to be processed according to the following formula:
T=T 1×(1−α)+ T 2×α, α>1,

where T 1 represents a detection temperature of one of the first temperature sensor, the second temperature sensor and the third temperature sensor, T 2 represents a detection temperature of another one of the first temperature sensor, the second temperature sensor and the third temperature sensor, and α represents a mixing ratio.

2. A heat treatment method using a heat treatment apparatus comprising: a processing container configured to process an object to be processed; a heating section, provided outside the processing container, configured to externally heat the processing container; a holding section configured to hold the object to be processed and to be carried into and out of the processing container; a holding section transport section configured to carry the holding section into and out of the processing container; a first temperature sensor, provided between the heating section and the processing container, configured to detect the temperature of the heating section; a second temperature sensor, fixed in the processing container, configured to detect the interior temperature of the processing container; a third temperature sensor to be carried into and out of the processing container along with the holding section; a control section for controlling a power to the heating section; and a temperature estimation section configured to select two of the first temperature sensor, the second temperature sensor and the third temperature sensor, and estimate the temperature of the object to be processed based on detection temperatures from the two temperature sensors, said method comprising:
loading an object to be processed into the holding section;
carrying the object to be processed, held in the holding section, into the processing container;
selecting in the temperature estimation section two of the first temperature sensor, the second temperature sensor and the third temperature sensor, and estimating the temperature of the object to be processed based on detection temperatures from the two temperature sensors; and
controlling the power of the heating section based on the temperature of the object to be processed, estimated by the temperature estimation section,
wherein the temperature estimation section determines the temperature T of the object to be processed according to the following formula:
T=T 1×(1−α)+ T 2×α, α>1,

where T 1 represents a detection temperature of one of the first temperature sensor, the second temperature sensor and the third temperature sensor, T 2 represents a detection temperature of another one of the first temperature sensor, the second temperature sensor and the third temperature sensor, and α represents a mixing ratio.

Assignees

• Yoshii Koji
• Yamaguchi Tatsuya
• Wang Wenling
• Saito Takanori
• Tokyo Electron Ltd

Inventors

• Yoshii Koji
• Yamaguchi Tatsuya
• Wang Wenling
• Saito Takanori

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• H01L21/67109 Primary

  Electricity · mapped topic

• H01L21/67248

  Electricity · mapped topic