Rapid Thermal Processing System With Cooling System
US-2024379390-A1 · Nov 14, 2024 · US
Temperature control system and temperature control method for substrate mounting table
US8950469B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8950469-B2 |
| Application number | US-90222510-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 12, 2010 |
| Priority date | Oct 14, 2009 |
| Publication date | Feb 10, 2015 |
| Grant date | Feb 10, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
A temperature control system includes a heat transfer medium supply configured to supply a first heat transfer medium of a first temperature into a heat transfer medium path; at least one heat transfer medium storage provided between the heat transfer medium path and the heat transfer medium supply and configured to store a second heat transfer medium of a second temperature higher than the first temperature; a heat transfer medium supply control device provided between the heat transfer medium supply and the heat transfer medium path and between the heat transfer medium storage and the heat transfer medium path and configured to stop a supply of the first heat transfer medium into the heat transfer medium path from the heat transfer medium supply and to supply the second heat transfer medium into the heat transfer medium path from the heat transfer medium storage when a heating unit generates heat.
First claim
Opening claim text (preview).
What is claimed is: 1. A temperature control system for a substrate mounting table that includes a heating unit and a heat transfer medium path and mounts thereon a substrate on which a preset process is performed, the system comprising: a first pipe connected with an inlet of the heat transfer medium path at an outside of a chamber in which the preset process is performed; a second pipe connected with an outlet of the heat transfer medium path at the outside of the chamber; a…
Assignees
Inventors
Classifications
Electricity · mapped topic
- H10P72/0602Primary
Electricity · mapped topic
- H01L21/67248Primary
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8950469B2 cover?
- A temperature control system includes a heat transfer medium supply configured to supply a first heat transfer medium of a first temperature into a heat transfer medium path; at least one heat transfer medium storage provided between the heat transfer medium path and the heat transfer medium supply and configured to store a second heat transfer medium of a second temperature higher than the fir…
- Who is the assignee on this patent?
- Sasaki Yasuharu, Nonaka Ryo, Nagayama Nobuyuki, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0602. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Feb 10 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).