Black body surface generation using laser material processing

Patent metadata

Field	Value
Publication number	US-2025385068-A1
Application number	US-202418742898-A
Country	US
Kind code	A1
Filing date	Jun 13, 2024
Priority date	Jun 13, 2024
Publication date	Dec 18, 2025
Grant date	—

Abstract

A chamber component of a processing chamber, including a body and a textured surface on at least one surface of the body, where the textured surface includes a lattice structure configured to absorb incident electromagnetic radiation at a plurality of frequencies and a plurality of angles of incidence.

First claim

What is claimed is:

1 . A chamber component of a processing chamber, comprising:
a body; and a textured surface on at least one surface of the body, wherein the textured surface comprises a lattice structure configured to absorb incident electromagnetic radiation at a plurality of frequencies and a plurality of angles of incidence.

2 . The chamber component of claim 1 , wherein the chamber component comprises a susceptor.

3 . The chamber component of claim 1 , wherein the chamber component comprises a substrate support, and wherein the at least one surface comprises an upper surface of the substrate support that is configured to support a substrate during processing.

4 . The chamber component of claim 1 , further comprising:
a silicon carbide coating on the at least one surface, wherein the silicon carbide coating comprises the textured surface.

5 . The chamber component of claim 1 , wherein the textured surface is configured to behave as a blackbody.

6 . The chamber component of claim 1 , wherein the lattice structure comprises a hexagonal lattice structure.

7 . The chamber component of claim 6 , wherein the hexagonal lattice structure comprises a plurality of hexagonal cells arranged in a continuous pattern, and wherein each hexagonal cell of the plurality of hexagonal cells shares at least one sidewall of six sidewalls forming a perimeter of the cell with an adjacent hexagonal cell.

8 . The chamber component of claim 7 , wherein each hexagonal cell of the plurality of hexagonal cells comprises a diameter ranging from 80 to 100 microns.

9 . The chamber component of claim 7 , wherein each hexagonal cell of the plurality of hexagonal cells comprises a depth ranging from 20 to 60 microns.

10 . The chamber component of claim 7 , wherein each hexagonal cell of the plurality of hexagonal cells is hollow having a substantially flat base.

11 . The chamber component of claim 7 , wherein the six sidewalls forming the perimeter of each hexagonal cell of the plurality of hexagonal cells are substantially vertical.

12 . The chamber component of claim 1 , wherein the textured surface has an emissivity of at least 0.7.

13 . A method comprising:
receiving chamber component of a processing chamber; and performing laser material processing on at least one surface of the chamber component of the processing chamber to form a textured surface, wherein the textured surface comprises a lattice structure configured to absorb incident electromagnetic radiation at a plurality of frequencies and a plurality of angles of incidence.

14 . The method of claim 13 , wherein the textured surface is configured to behave as a blackbody.

15 . The method of claim 13 , wherein the lattice structure comprises a hexagonal lattice structure.

16 . The method of claim 13 , further comprising:
coating the at least one surface with a silicon carbide coating, wherein the laser material processing is performed to form the textured surface in the silicon carbide coating.

17 . A system comprising:
a processing chamber; and a susceptor disposed within the processing chamber, the susceptor comprising:
a top surface comprising a plurality of pockets, wherein each of the plurality of pockets is configured to receive a substrate, and wherein the top surface comprises a lattice structure configured to absorb incident electromagnetic radiation at a plurality of frequencies and a plurality of angles of incidence.

18 . The system of claim 17 , wherein the top surface comprises a silicon carbide coating on the surface, and wherein the silicon carbide coating comprises the lattice structure.

19 . The system of claim 18 , wherein the lattice structure comprises a plurality of hexagonal cells arranged in a continuous pattern, and wherein each hexagonal cell of the plurality of hexagonal cells shares at least one sidewall of six sidewalls forming a perimeter of the cell with an adjacent hexagonal cell.

20 . The system of claim 17 , wherein the lattice structure is configured to behave as a blackbody.

Assignees

• Applied Materials Inc

Inventors

• Joshi Gagandeep Singh
• Subramani Anantha
• Sommers Joseph Frederick
• Behnke Joseph Frederick
• Beaudry Christopher Laurent
• Lei Wei-Sheng

Classifications

• H01J2237/0266

  electromagnetic · CPC title

• H01J37/165 Primary

  Means associated with the vessel for preventing the generation of or for shielding unwanted radiation, e.g. X-rays · CPC title

• G21F1/06

  Ceramics; Glasses; Refractories (cermets G21F1/08) · CPC title

• G21F3/00 Primary

  Shielding characterised by its physical form, e.g. granules, or shape of the material · CPC title