Vacuum apparatus and charged particle beam writing apparatus

Patent metadata

Field	Value
Publication number	US-2019371567-A1
Application number	US-201916427997-A
Country	US
Kind code	A1
Filing date	May 31, 2019
Priority date	Jun 4, 2018
Publication date	Dec 5, 2019
Grant date	—

Abstract

A vacuum apparatus according to an embodiment includes a chamber configured air-tightly, a vacuum pump configured to exhaust gas from the chamber, and an exhaustion structure placed between the chamber and an inlet port of the vacuum pump and having a ventilation path surrounded by a wall of the exhaustion structure. The vacuum pump exhausts gas from the chamber through the ventilation path of the exhaustion structure. A layer of thermal energy absorbing material is formed on at least part of an inner surface of the wall of the exhaustion structure to absorb energy of thermal radiation emitted from the inlet port of the vacuum pump.

First claim

What is claimed is:

1 . A vacuum apparatus comprising:
a chamber; a vacuum pump configured to exhaust gas from the chamber; and an exhaustion structure placed between the chamber and an inlet port of the vacuum pump and having a ventilation path surrounded by a wall of the exhaustion structure, wherein: the vacuum pump exhausts gas from the chamber through the ventilation path of the exhaustion structure; and a layer of thermal energy absorbing material is formed on at least part of an inner surface of the wall of the exhaustion structure to absorb energy of thermal radiation emitted from the inlet port of the vacuum pump.

2 . The vacuum apparatus according to claim 1 , wherein the wall of the exhaustion structure is formed of material whose thermal conductivity is high to conduct the energy of thermal radiation absorbed by the thermal energy absorbing material and dissipate heat from an outer surface of the wall.

3 . The vacuum apparatus according to claim 1 , wherein:
the wall of the exhaustion structure is formed to have a concave section on an inner surface opposed to the inlet port of the vacuum pump; and the inner surface of the wall of the exhaustion structure in which the concave section is formed is covered with the thermal energy absorbing material.

4 . The vacuum apparatus according to claim 3 , wherein the concave section of the wall of the exhaustion structure has an internal space that is shaped like one of a box, a cylinder, a dome, a cone, a geometrical pyramid, a circular truncated cone, and a truncated pyramid.

5 . The vacuum apparatus according to claim 1 , wherein the exhaustion structure includes a radiating fin on at least part of an outer surface of the wall.

6 . The vacuum apparatus according to claim 1 , further comprising a heat insulating member between the chamber and the wall of the exhaustion structure to prevent the energy of thermal radiation absorbed by the thermal energy absorbing material from being conducted to the chamber through the wall of the exhaustion structure.

7 . The vacuum apparatus according to claim 6 , wherein:
an electric insulation member is provided for the heat insulating member between the chamber and the wall of the exhaustion structure; and the apparatus further comprises a conductor which electrically couples the chamber with the wall of the exhaustion structure.

8 . The vacuum apparatus according to claim 1 , further comprising:
a flow path formed in the chamber close to the wall of the exhaustion structure for a flow of a coolant; and a cooling device configured to cause the coolant to flow through the flow path.

9 . The vacuum apparatus according to claim 1 , further comprising:
a flow path formed in the wall of the exhaustion structure close to the chamber for a flow of a coolant in the wall of the exhaustion structure; and a cooling device configured to cause the coolant to flow into the flow path.

10 . A charged particle beam writing apparatus comprising:
a chamber; a stage which is provided movably in the chamber and on which a target object is placed; a column placed on the chamber, and including a charged particle beam irradiation mechanism configured to irradiate the target object placed on the stage with a charged particle beam to write a pattern on the target object; a vacuum pump configured to exhaust gas from the column and the chamber; and an exhaustion structure placed between the chamber and an inlet port of the vacuum pump and having a ventilation path surrounded by a wall of the exhaustion structure, wherein: the vacuum pump exhausts gas from the chamber through the ventilation path of the exhaustion structure; and a layer of thermal energy absorbing material is formed on at least part of an inner surface of the wall of the exhaustion structure to absorb energy of thermal radiation emitted from the inlet port of the vacuum pump.

Assignees

• Nuflare Technology Inc

Inventors

• Ideno Keita
• Nishiyama Tetsuro
• Saito Hiroyasu

Classifications

• H01J37/18

  Vacuum locks {; Means for obtaining or maintaining the desired pressure within the vessel} · CPC title

• H01J2237/1825

  Evacuating means · CPC title

• H01J37/165 Primary

  Means associated with the vessel for preventing the generation of or for shielding unwanted radiation, e.g. X-rays · CPC title

• H01J2237/0203

  Protection arrangements · CPC title

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title