Apparatus and method for detecting and monitoring objects in a fluid bath and adjusting the fluid bath based on the measured object properties

Patent metadata

Field	Value
Publication number	US-2025308960-A1
Application number	US-202418622541-A
Country	US
Kind code	A1
Filing date	Mar 29, 2024
Priority date	Mar 29, 2024
Publication date	Oct 2, 2025
Grant date	—

Abstract

Techniques herein include an apparatus and method for measuring and monitoring properties of objects, such as bubbles, detected in a fluid in a semiconductor processing apparatus. The method can track the detected objects over time through multiple frames of video data and determine metrics for the detected objects to improve tracking accuracy as well as correlate recipe parameters to resulting wafer quality processed via the recipe parameters. Based on the determined correlation between the wafer quality data and the determined object metrics, the recipe parameters can be adjusted to improve wafer quality further.

First claim

What is claimed is:

1 . A semiconductor processing apparatus for detecting objects in a fluid, comprising:
processing circuitry configured to
receive video data including a plurality of frames,
detect, in a first frame of the video data, a first object,
determine first metrics for the first object in the first frame, the first metrics including a position of the first object and a size of the first object,
detect, in a second frame of the video data, a second object,
determine second metrics for the second object in the second frame, the second metrics including a position of the second object and a size of the second object,
determine a first difference between the first metrics of the first object in the first frame and the second metrics of the second object in the second frame, and
based on the determined first difference, determine whether the first object in the first frame is a same object as the second object in the second frame.

2 . The apparatus of claim 1 , wherein the processing circuitry is further configured to
receive data related to a quality of a wafer processed in the fluid using a corresponding first processing recipe defining a first set of parameters, and based on the wafer quality data, the first metrics, and the second metrics, adjust the first set of parameters of the first recipe to generate a second recipe.

3 . The apparatus of claim 1 , wherein the processing circuitry determines whether the first object in the first frame is the same object as the second object in the second frame based on the determined first difference by
based on the determined first difference, assigning a probability value to the second object in the second frame defining a likelihood of the first object in the first frame being the same object as the second object in the second frame.

4 . The apparatus of claim 1 , wherein the processing circuitry is configured to determine the first difference by determining a difference between the size of the first object in the first frame and the size of the second object in the second frame.

5 . The apparatus of claim 1 , wherein the processing circuitry is configured to determine the first difference by determining a distance between the position of the first object in the first frame and the position of the second object in the second frame.

6 . The apparatus of claim 1 , wherein the processing circuitry is configured to determine the first difference by determining an area overlap between an area of the first object in the first frame and an area of the second object in the second frame.

7 . The apparatus of claim 1 , wherein the apparatus further comprises
a first light source configured to emit light having a predetermined wavelength range; and an imaging device configured to obtain the video data by capturing the emitted light from the first light source, the imaging device being sensitive to the predetermined wavelength range of the emitted light.

8 . The apparatus of claim 7 , wherein
the first light source is configured to emit light along a predetermined plane through a volume of the fluid, and the imaging device is configured to only capture the emitted light by the first light source along the predetermined plane through the volume of the fluid.

9 . The apparatus of claim 1 , wherein the processing circuitry is configured to detect the first object in the first frame and detect the second object in the second frame by
applying, to each pixel in each frame of the video data, a filter to generate a transformed frame, and detecting, in the transformed frames, the first object and the second object.

10 . The apparatus of claim 1 , wherein the processing circuitry is further configured to
after determining the second metrics for the second object in the second frame, determine whether additional objects are disposed in the second frame, upon determining additional objects are disposed in the second frame, detect, in the second frame, a third object, and determine third metrics for the third object in the second frame, the third metrics including a position of the third object and a size of the third object.

11 . The apparatus of claim 10 , wherein
the processing circuitry is further configured to determine a second difference by determining a difference between the first metrics of the first object in the first frame and the third metrics of the third object in the third frame, and the processing circuitry determines whether the first object in the first frame is the same object as the second object in the second frame or the same object as the third object in the second frame based on the determined first difference and the determined second difference.

12 . The apparatus of claim 11 , wherein the processing circuitry determines whether the first object in the first frame is the same object as the second object in the second frame or the same object as the third object in the second frame based on the determined first difference and the determined second difference by
based on the determined first difference, assigning a first probability value to the second object in the second frame defining a likelihood of the first object in the first frame being the same object as the second object in the second frame, based on the determined second difference, assigning a second probability value to the third object in the second frame defining a likelihood of the first object in the first frame being the same object as the third object in the second frame, and determining whether the first object in the first frame is the same object as the second object in the second frame or the same object as the third object in the second frame based on the second object or the third object having the higher probability value.

13 . The apparatus of claim 1 , wherein the processing circuitry is configured to detect the first object in the first frame by
determining a first region of interest in an area of the first frame, the first region of interest including the first object disposed therein, and detecting, in the first region of interest, the first object.

14 . The apparatus of claim 13 , wherein the processing circuitry is configured to detect the second object in the second frame by
determining a second region of interest in an area of the second frame, the second region of interest including the second object disposed therein, the second region of interest having a position and size within the area of the second frame that is the same as a position and size of the first region within the area of the first frame, and detecting, in the second region of interest, the second object.

15 . The apparatus of claim 1 , wherein the first object and the second object are bubbles.

16 . A method of detecting objects in a fluid in a semiconductor manufacturing apparatus, comprising:
receiving video data including a plurality of frames; detecting, in a first frame of the video data, a first object; determining first metrics for the first object in the first frame, the first metrics including a position of the first object and a size of the first object; detecting, in a second frame of the video data, a second object; determining second metrics for the second object in the second frame, the second metrics including a position of the second object and a size of the second object; determining a first difference between the first metrics of the first object in the first frame and the second metrics of the second object in the second frame; and based on the determined first difference, determining whethe

Assignees

• Tokyo Electron Ltd

Inventors

• Estrella Joel

Classifications

• H10P74/238

  comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement · CPC title

• H10P72/0604 Primary

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• G06T7/70

  Determining position or orientation of objects or cameras (camera calibration G06T7/80) · CPC title

• G06T7/0004

  Industrial image inspection · CPC title

• G06T7/001

  using an image reference approach · CPC title