Method for cleaning an apparatus for a tin compound and the cleaned apparatus obtained thereby

Patent metadata

Field	Value
Publication number	US-2025222492-A1
Application number	US-202419000069-A
Country	US
Kind code	A1
Filing date	Dec 23, 2024
Priority date	Jan 5, 2024
Publication date	Jul 10, 2025
Grant date	—

Abstract

A method for efficiently and safely cleaning an apparatus for a tin compound and a highly purified apparatus for a tin compound are provided. A method of cleaning an apparatus that has been in contact with a tin compound having formula (1) includes at least steps (A) to (C) in this order:
(A) a step of cleaning the apparatus with a non-protonic solvent, (B) a step of cleaning the apparatus with an acidic aqueous solution and/or alkaline aqueous solution, and (C) a step of cleaning the apparatus with ultrapure water having a resistivity of 17 MΩ·cm at 25° C.

R p S n X m   (1)

R is a hydrocarbon group, p is an integer of 0 to 3, X is a hydrolyzable substituent, and m=4- p.

First claim

We claim:

1 . A method for cleaning an apparatus that has been in contact with a tin compound having formula (1), the method comprising at least steps (A) to (C), wherein step (B) is performed after step (A), and step (C) is performed after step (B):
(A) a step of cleaning the apparatus with a non-protonic solvent, (B) a step of cleaning the apparatus with an acidic aqueous solution and/or an alkaline aqueous solution, and (C) a step of cleaning the apparatus with ultrapure water having a resistivity of 17 MΩ·cm at 25° C.;
R p SnX m   (1)

wherein R is a hydrocarbon group, p is an integer of 0 to 3, X is a hydrolyzable substituent, and m=4-p.

2 . The method for cleaning an apparatus according to claim 1 , wherein the step (A) is followed by performing the step (B) sequentially without any other intervening cleaning steps.

3 . The method for cleaning an apparatus for a tin compound according to claim 1 , further comprising after the step (A), performing a drying step and then performing the step (B) sequentially.

4 . The method of cleaning the apparatus for a tin compound according to claim 1 , wherein after the above step (A), a step of cleaning with alcohol and the drying step are performed, and then the above step (B) is performed sequentially.

5 . The method for cleaning an apparatus for a tin compound according to claim 1 , wherein the non-protonic solvent comprises at least one solvent selected from the group consisting of aromatic hydrocarbons, aliphatic hydrocarbons, esters, and ethers.

6 . The method for cleaning an apparatus for a tin compound according to claim 1 , wherein the acidic aqueous solution is a nitric acid aqueous solution with a concentration of 3 to 30% by mass.

7 . The method for cleaning an apparatus for a tin compound according to claim 1 , wherein a pH of the alkaline aqueous solution is 11.5 or less.

8 . The method for cleaning an apparatus for a tin compound according to claim 1 , wherein the alkaline aqueous solution is at least one solution selected from the group consisting of a phosphate solution, a sodium hydroxide solution, and a potassium hydroxide solution.

9 . The method for cleaning an apparatus for a tin compound according to claim 8 , wherein a concentration of sodium hydroxide and/or potassium hydroxide is 0.5 to 2% by mass.

10 . The method for cleaning an apparatus for a tin compound according to claim 1 , further comprising performing a drying step after the step (C).

11 . The method for cleaning an apparatus for a tin compound according to claim 1 , wherein a value of p in the formula (1) is 0 or 1.

12 . The method for cleaning an apparatus for a tin compound according to claim 1 , wherein the tin compound having formula (1) is at least one selected from the group consisting of t-butyltris(dimethylamino)tin, n-butyltris(dimethylamino)tin, t-butyltris(diethylamino)tin, di-t-butylbis(dimethylamino)tin, sec-butyltris(dimethylamino)tin, n-pentyltris(dimethylamino)tin, isobutyltris(dimethylamino)tin, isopropyltris(dimethylamino)tin, t-butyltri-t-butoxytin, n-butyltri-t-butoxytin, isopropyltri-t-butoxytin, isopropyltri-t-amyloxytin, t-butyltri-t-amyloxytin, tetra-t-butoxytin, tetrakis(dimethylamino) tin, 1-methyl-1-cyclopentyltris(dimethylamino)tin, and 1-methyl-1-cyclopentyltri-t-butoxytin.

13 . An apparatus for a tin compound that has been in contact with the tin compound having formula (1) and has been cleaned by the cleaning method according to claim 1 .

14 . The apparatus for a tin compound according to claim 13 , which is a container for storing tin compounds.

15 . The apparatus for a tin compound according to claim 13 , wherein when ultrapure water having a resistivity of 17 MΩ·cm at 25° C. is filled into the apparatus and left at 25° C. for 1 hour, a content of each metal element sodium, potassium, magnesium, iron, chromium, and nickel is 1.5 mass ppb or less.

16 . The apparatus for a tin compound according to claim 13 , wherein when ultrapure water with a resistivity of 17 MΩ·cm at 25° C. is filled into the apparatus and left at 25° C. for 1 hour, an increase in halogen ion concentration in the water is 100 mass ppb or less and an increase in a number of particles with a diameter of 0.5 μm or more is 100 particles/mL or less.

17 . The apparatus for a tin compound according to claim 13 , wherein when the tin compound having formula (1) is placed in the apparatus, sealed under an inert gas atmosphere, and stored at 25° C. for one month, a decrease in the purity of the tin compound is 0.1 mass % or less.

18 . The apparatus for a tin compound according to claim 13 , wherein when the apparatus is vacuum-dried and then filled with helium at 34.5 kPa, an amount of helium leaking from the joint part is 5×10 −9 Pa·m 3 /s or less as measured by a helium detector.

19 . The apparatus for a tin compound according to claim 15 , which is a container for storing tin compounds.

20 . A pattern forming method for a semiconductor, including a step of depositing a tin compound having formula (1) on a substrate using an apparatus that has been in contact with the tin compound having formula (1) to obtain a thin film, a step of exposing the thin film to radiation, and a step of developing the exposed thin film, wherein the apparatus is a tin compound storage container in which when ultrapure water having a resistivity of 17 MΩ·cm at 25° C. is filled into the apparatus and left at 25° C. for 1 hour, the content of each metal element sodium, potassium, magnesium, iron, chromium, and nickel is 1.5 mass ppb or less:
R p SnX m   (1)

wherein R is a hydrocarbon group, p is an integer of 1 to 3, X is a hydrolyzable substituent, and m=4-p.

Assignees

• Mitsubishi Chem Corp
• Gelest Inc

Inventors

• Ishii Koki
• Fukui Hiroshi
• Yang Li

Classifications

• H10P76/2041

  Photolithographic processes · CPC title

• C11D7/5004 Primary

  Organic solvents · CPC title

• C11D7/08

  Acids · CPC title

• C11D7/06

  Hydroxides · CPC title

• B08B2220/00

  Type of materials or objects being removed · CPC title