Substrate processing method and substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-2024222157-A1
Application number	US-202418608043-A
Country	US
Kind code	A1
Filing date	Mar 18, 2024
Priority date	Mar 26, 2020
Publication date	Jul 4, 2024
Grant date	—

Abstract

A substrate processing method includes holding a substrate on which a boron-containing silicon film is formed; supplying an oxidative aqueous solution including hydrofluoric acid and nitric acid to the held substrate; and etching the boron-containing silicon film of the substrate with the oxidative aqueous solution.

First claim

We claim:

1 . A substrate processing method, comprising:
holding a substrate on which a boron-containing silicon film is formed; supplying an oxidative aqueous solution including hydrofluoric acid and nitric acid to the held substrate; and etching the boron-containing silicon film of the substrate with the oxidative aqueous solution, wherein in the supplying of the oxidative aqueous solution, the oxidative aqueous solution is supplied by an upper nozzle toward a front surface of a peripheral portion of the substrate, and the oxidative aqueous solution is supplied by a lower nozzle toward a rear surface of a peripheral portion of the substrate.

2 . The substrate processing method of claim 1 ,
wherein a mixing ratio between the hydrofluoric acid and the nitric acid in the oxidative aqueous solution is in a range from 1:1 to 1:10.

3 . The substrate processing method of claim 2 ,
wherein a temperature of the oxidative aqueous solution is in a range from 20° C. to 80° C.

4 . The substrate processing method of claim 2 ,
wherein the oxidative aqueous solution further includes acetic acid.

5 . The substrate processing method of claim 1 ,
wherein a temperature of the oxidative aqueous solution is in a range from 20° C. to 80° C.

6 . The substrate processing method of claim 1 ,
wherein the oxidative aqueous solution further includes acetic acid.

7 . A substrate processing apparatus, comprising:
a substrate holder configured to hold a substrate on which a boron-containing silicon film is formed; and a processing liquid supply, including an upper nozzle and a lower nozzle, configured to supply an oxidative aqueous solution including hydrofluoric acid and nitric acid to the substrate held by the substrate holder, wherein the processing liquid supply is configured to supply the oxidative aqueous solution toward a front surface of a peripheral portion of the substrate by the upper nozzle, and toward a rear surface of the peripheral portion of the substrate by the lower nozzle.

8 . The substrate processing apparatus of claim 7 ,
wherein the substrate holder holds the substrate rotatably, and the processing liquid supply supplies the oxidative aqueous solution to the peripheral portion of the substrate being rotated at a rotation number ranging from 400 rpm to 1000 rpm.

Assignees

• Tokyo Electron Ltd

Inventors

• Kang Song Yun
• Tsuda Toshitake
• Sekiguchi Kenji
• Yonezawa Syuhei
• Kagawa Koji

Classifications

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P70/54

  Cleaning of wafer edges · CPC title

• H10P50/642

  Chemical etching · CPC title

• H10P50/73

  using masks for insulating materials · CPC title

• H10P14/6923

  the material being boron or phosphorus doped silicon oxides, e.g. BPSG, BSG or PSG · CPC title