Substrate processing method and substrate processing apparatus
US-2024222157-A1 · Jul 4, 2024 · US
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Tsuda Toshitake patents
Tsuda Toshitake is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Tsuda Toshitake |
| Total patents | 3 |
| First publication | Sep 30, 2021 |
| Latest publication | Jul 4, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Method of manufacturing semiconductor device
US-2022013404-A1 · Jan 13, 2022 · US
Substrate processing method and substrate processing apparatus
US-2021305066-A1 · Sep 30, 2021 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0414 | 2 |
| H10P70/54 | 2 |
| H10P50/642 | 2 |
| H10P50/73 | 2 |
| H10P14/6923 | 2 |