Over-Under Sensor Packaging with Sensor Spaced Apart from Control Chip

Patent metadata

Field	Value
Publication number	US-2020048075-A1
Application number	US-201916659936-A
Country	US
Kind code	A1
Filing date	Oct 22, 2019
Priority date	Jul 18, 2017
Publication date	Feb 13, 2020
Grant date	—

Abstract

An embodiment device includes a body structure having an interior cavity, a control chip disposed on a first interior surface of the interior cavity, and a sensor attached, at a first side, to a second interior surface of the interior cavity opposite the first interior surface. The sensor has a mounting pad on a second side of the sensor that faces the first interior surface, and the sensor is vertically spaced apart from the control chip by an air gap, with the sensor is aligned at least partially over the control chip. The device further includes an interconnect having a first end mounted on the mounting pad, the interconnect extending through the interior cavity toward the first interior surface, and the control chip is in electrical communication with the sensor by way of the interconnect.

First claim

What is claimed is:

1 . A method, comprising:
attaching a first side of a sensor to a first side of a lid, the sensor having a contact pad disposed on a second side of the sensor opposite the first side; providing an interconnect on the contact pad, wherein a first end of the interconnect is attached to the contact pad, and wherein the interconnect extends away from the contact pad; attaching a control chip to a first side of a substrate and electrically connecting the control chip to a landing pad disposed at the first side of the substrate; and affixing the lid over the substrate, wherein the affixing forms an interior cavity between the lid and the substrate; wherein, after the affixing, the sensor and the control chip each extend into the interior cavity and an air gap is provided between the sensor and the control chip, and wherein, after the affixing, the interconnect extends through the interior cavity, and a second end of the interconnect makes electrical contact with the landing pad.

2 . The method of claim 1 , wherein, after the affixing, the sensor is at least partly laterally aligned over the control chip.

3 . The method of claim 2 , wherein the providing the interconnect comprises forming a wirebond interconnect with the first end of the interconnect as a ball end.

4 . The method of claim 2 , further comprising forming a sidewall on the substrate with a first end of the sidewall affixed to the substrate, wherein the sidewall is conductive, and wherein the lid is formed from a conductive material;
wherein the affixing the lid over the substrate comprises affixing the lid to a second end of the sidewall; and wherein, after the affixing, the lid and sidewall provide electromagnetic interference (EMI) shielding for the control chip and the sensor.

5 . The method of claim 2 , wherein the lid includes a side portion extending past the sensor; and
wherein the affixing the lid over the substrate comprises affixing the side portion of the lid to the substrate.

6 . The method of claim 2 , wherein the lid is a center lid disposed on a second package portion having a back volume for the sensor, and wherein the center lid has a port extending from the back volume through the center lid;
wherein the substrate is part of a first package portion having first sidewalls disposed on the substrate; and wherein the affixing the lid over the substrate comprises affixing the second package portion to ends of the first sidewalls of the first package portion, and wherein the affixing forms the interior cavity as a front volume for the sensor.

7 . A method, comprising:
providing a body structure having an interior cavity and a control chip disposed on a first interior surface of the interior cavity; providing a landing pad disposed on the first interior surface and electrically connected to the control chip; providing a sensor attached, at a first side, to a second interior surface of the interior cavity opposite the first interior surface, the sensor having a mounting pad on a second side of the sensor that faces the first interior surface, wherein the sensor is vertically spaced apart from the control chip by an air gap, and wherein the sensor is aligned at least partially over the control chip after the sensor is provided on the second interior surface, and wherein at least a first portion of the landing pad is aligned directly under the sensor; and providing an interconnect with a first end mounted on, and in direct contact with, the mounting pad, the interconnect extending substantially vertically, with respect to the sensor, through the interior cavity toward the first interior surface, wherein all side surfaces of the interconnect are spaced apart from the interior surfaces of the interior cavity, wherein the side surfaces of the interconnect extend contiguously from the first end of the interconnect to a second end of the interconnect and are exposed to the interior cavity, and wherein the second end of the interconnect is connected to the first portion of the landing pad by a conductive connector in direct contact with the landing pad and the second end of the interconnect; wherein the control chip is in electrical communication with the sensor by way of the interconnect and landing pad after the sensor is provided on the second interior surface.

8 . The method of claim 7 , wherein the body structure includes a sidewall, a lid and a substrate, wherein a surface of the substrate is the first interior surface, wherein a surface of the lid is the second interior surface, and wherein the providing the sensor attached to the second interior surface comprises attaching the lid to the substrate by way of the sidewall.

9 . The method of claim 8 , wherein the lid is formed from a first conductive material, wherein the sidewall comprises a second conductive material, and wherein the lid and the sidewall provide electromagnetic interference (EMI) shielding for the control chip and the sensor after the attaching the lid to the substrate.

10 . The method of claim 7 , wherein the body structure includes a lid and a substrate, wherein a first surface of the substrate is the first interior surface, wherein a second surface of the lid is the second interior surface, and wherein the lid has side portions that extend past the sensor and bound the interior cavity, and wherein the providing the sensor on the second interior surface comprises attaching the lid to the substrate at ends of the side portions.

11 . The method of claim 7 , wherein the interconnect is a wirebond interconnect, and wherein the first end of the interconnect is a ball end.

12 . A method, comprising:
providing a substrate having a first contact pad; proving a sidewall; a control chip disposed on the substrate and in electrical communication with the first contact pad; a landing pad disposed on the substrate and electrically connected to the control chip; providing a lid having a sensor attached, at a first side of the sensor, to the lid, the sensor having a mounting pad; providing an interconnect having a first end mounted on, and in direct contact with, the mounting pad; and attaching the lid to the substrate by the sidewall, wherein, after the attaching the lid to the substrate, the lid is separated from the substrate by an interior cavity that is bounded by the sidewall, the lid and the substrate, the sensor extending from the lid into the interior cavity after the attaching the lid, wherein, after the attaching the lid, the control chip extends from the substrate into the interior cavity, wherein the sensor is vertically spaced apart from the control chip by an air gap after the attaching the lid, wherein the sensor is aligned at least partially over the control chip after the attaching the lid, and wherein at least a first portion of the landing pad is aligned directly under the sensor after the attaching the lid; wherein, after the attaching the lid, the interconnect extends substantially vertically, with respect to the sensor, through the interior cavity and makes electrical contact, at a second end of the interconnect opposite the first end, with the first contact pad, wherein the interconnect is spaced apart from side surfaces of the interior cavity after the attaching the lid, wherein, after the attaching the lid, side surfaces of the interconnect extend contiguously from the first end of the interconnect to a second end of the interconnect and are exposed to the interior cavity, and wherein, after the attaching the lid, the second end of the interconnect is connected to the first portion of the landing pad by a conductive connector in direct contact with the landing pad and the s

Assignees

• Infineon Technologies Ag

Inventors

• Chan Sook Woon
• Chiang Chau Fatt
• Chua Kok Yau
• Lee Swee Kah
• Ng Chee Yang

Classifications

• H04R19/04

  Microphones (H04R19/01 takes precedence) · CPC title

• H04R1/086

  Protective screens, e.g. all weather or wind screens · CPC title

• H04R19/005 Primary

  using semiconductor materials · CPC title

• B81B7/0035

  for maintaining a controlled atmosphere inside of the chamber containing the MEMS · CPC title

• H04R1/04

  Structural association of microphone with electric circuitry therefor (in electric hearing aids H04R25/00) · CPC title